Small-angle X-ray scatterometry for high aspect ratio hole orientation
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Solution Overview
Problem
Current X-ray scatterometry techniques face challenges in accurately measuring the orientations and alignments of high aspect ratio (HAR) holes in semiconductor devices, particularly in arrays of HAR holes, due to manufacturing imperfections and the need for precise angular measurements.
Innovation Solution
The development of a small-angle X-ray scattering (SAXS) system that includes a motorized stage, an X-ray source, a detector, and a processor to analyze scattered X-rays, utilizing beam conditioning assemblies and slit assemblies to improve angular resolution and sensitivity, allowing for the measurement of HAR features with enhanced precision and accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional X-ray scatterometry techniques are used, then measurement capability is provided, but measurement precision and sensitivity are insufficient for HAR holes
Solution Approach 1:
The patent changes the scattering angle parameter from conventional angles to small angles (typically less than 5 degrees), which enhances the sensitivity and precision of measurements for HAR holes. This parameter change allows better detection of subtle geometrical variations in high aspect ratio structures.
Solution Approach 2:
The patent introduces a motorized stage that enables movement of the sample in multiple dimensions, allowing the X-ray beam to scan across the sample surface and detect scattered X-rays at various positions. This dimensional addition transforms the measurement capability from static to dynamic, improving both precision and coverage.
2Measurement precision
If small-angle X-ray scattering is implemented with motorized stage and advanced configurations, then sensitivity and resolution are significantly improved, but device complexity increases
Solution Approach 1:
The motorized stage serves multiple functions: it positions the sample, enables scanning across different regions, and facilitates angular measurements. This multi-functionality reduces the need for separate specialized components, managing device complexity while maintaining high resolution capabilities.
Solution Approach 2:
The patent replaces complex mechanical measurement systems with an X-ray scattering-based measurement system controlled by a motorized stage. This substitution uses optical/X-ray fields instead of purely mechanical contact methods, achieving higher resolution with more controllable and potentially less mechanically complex systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system significantly improves the sensitivity and resolution of SAXS measurements, enabling more accurate determination of geometrical features and orientations of HAR holes, even in arrays, by adjusting X-ray beam properties and using advanced detector configurations.
Implementation Method 1
A source-mount in the first region rotates about the axis, and an X-ray source on the source-mount directs first and second incident beams of X-rays to impinge on the sample at first and second angles along beam axes that are orthogonal to the axis. A detector-mount in the second region moves in a plane orthogonal to the axis and an X-ray detector on the detector-mount receives first and second diffracted beams of X-rays transmitted through the sample
Implementation Method 2
An X-ray optical device is provided that includes a crystal containing a channel, which passes through the crystal and has multiple internal faces. A mount is configured to hold the crystal in a fixed location relative to a source of an X-ray beam and to shift the crystal automatically between two predefined dispositions: a first disposition in which the X-ray beam passes through the channel while diffracting from one or more of the internal faces
Data Source
AI summary
An x-ray apparatus, that may include a mount that is configured to hold a sample; an x-ray source, that is configured to direct an x-ray beam toward a first side of the sample; a detector, positioned downstream to a second side of the sample, the detector is configured to detect, during a sample measurement period, at least a part of x-rays that have been transmitted through the sample; and an x-ray intensity detector that is positioned, during a beam intensity monitoring period at a measurement position that is located between the x-ray source and the first side of the sample, so as to detect at least a part of the x-ray beam before the x-ray beam reaches the sample.