Soft Metal Thermal Interface for Substrate Cooling
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in achieving efficient heat conduction between the stage and the freezing device due to high thermal resistance at the contact interface, which affects cooling performance and processing uniformity.
Innovation Solution
Incorporating a heat conductive member made of soft metal, such as indium, between the stage and the freezing device, which is elastically deformable and has a lower hardness than the materials of the stage and the freezing device, to reduce thermal resistance and enhance heat conduction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a heat conductive member made of soft metal is interposed between the stage and freezing device, then thermal resistance at the contact interface is reduced and heat conduction is enhanced, but the device structure becomes more complex
Solution Approach 1:
A heat conductive member made of soft metal (such as indium) is introduced as an intermediary between the stage and freezing device. This soft metal layer fills micro-gaps and irregularities at the contact interface, creating intimate thermal contact and significantly reducing thermal resistance. The soft metal acts as a mediator that improves heat transfer without requiring complex mechanical pressure systems or specialized contact surface geometries.
2Temperature
If the freezing device is brought closer to the stage to reduce thermal resistance, then cooling performance is improved, but the risk of contamination between the freezing device and stage increases
Solution Approach 1:
The soft metal heat conductive member serves as a protective intermediary layer between the freezing device and stage. It enables effective thermal contact while maintaining a physical barrier that prevents direct contact between the components, thereby eliminating contamination risks associated with bringing the freezing device too close to the stage.
Solution Approach 2:
The soft metal heat conductive member functions as a flexible thin film that conforms to the surface irregularities of both the stage and freezing device. This flexible layer maintains intimate thermal contact for improved cooling performance while acting as a protective barrier that prevents contamination between the two components.
3Device complexity
If direct contact between the stage and freezing device is used, then the device structure is simpler, but thermal resistance is high and cooling performance is insufficient
Solution Approach 1:
The soft metal heat conductive member is introduced as a simple intermediary layer that dramatically improves thermal contact between the stage and freezing device. Rather than complicating the device structure with active control systems or specialized mechanisms, this passive soft metal layer naturally conforms to surface irregularities and reduces thermal resistance through its excellent thermal conductivity and deformability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The use of a soft metal heat conductive member reduces thermal resistance, allowing for improved cooling performance and faster temperature stabilization of the stage, enabling more efficient substrate processing.
Implementation Method 1
a heat conductive member interposed between the first contact surface and the second contact surface, wherein the heat conductive member is made of a soft metal that is softer than at least one of a material of the first contact surface or a material of the second contact surface
Data Source
AI summary
A substrate processing apparatus includes: a stage having a first contact surface; a freezing device having a second contact surface; an elevating device to be capable of thermally connecting or separating the second contact surface and the first contact surface; and a heat conductive member interposed between the first contact surface and the second contact surface, wherein the heat conductive member is made of a soft metal that is softer than at least one of a material of the first contact surface or a material of the second contact surface.