Soft Metallic Seal for Ultra-High Vacuum Pressure Maintenance
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Solution Overview
Problem
Existing vacuum systems face difficulties in achieving and maintaining ultra-high vacuum pressures below 10^-9 hPa, as conventional seals outgas and are prone to damage at low pressures.
Innovation Solution
A vacuum system utilizing a soft metallic or elastomer flat seal with a Brinell hardness of less than HB 20, combined with a turbomolecular pump and aluminum housing, to minimize outgassing and deformation, and a radially outer elastomer seal for effective sealing and evacuation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional seals are used in vacuum systems, then sealing function is achieved, but outgassing occurs and ultra-high vacuum pressures below 10^-9 hPa cannot be maintained
Solution Approach 1:
The patent changes the material parameter of the seal from conventional elastomers to soft metallic material with specific hardness characteristics (HB < 35, preferably HB < 20). This parameter change reduces outgassing significantly while maintaining sealing effectiveness, enabling ultra-high vacuum pressures below 10^-9 hPa to be achieved and maintained.
Solution Approach 2:
The patent employs a composite sealing approach using soft metallic material that combines the advantages of metal (low outgassing) with softness (good sealing). The soft metallic material acts as a composite solution between traditional elastomer seals and metal seals, providing both low outgassing and adequate sealing performance.
2Reliability
If hard seals are used to ensure sealing strength, then sealing reliability improves, but damage or deformation to the inlet or outlet section occurs
Solution Approach 1:
The patent optimizes the hardness parameter of the seal material to be soft (HB < 35, preferably HB < 20), which is significantly softer than aluminum housing. This parameter optimization allows the seal to deform and conform to the mating surface without causing damage, while still providing reliable sealing through controlled deformation.
Solution Approach 2:
Instead of making the seal hard to ensure sealing strength, the patent inverts the approach by using a soft seal material that achieves sealing through controlled deformation and conformability. The soft metallic material deforms to fill surface irregularities, creating effective sealing without the need for high hardness.
3Strength
If the first seal is made very soft to avoid damage to housing, then deformation of housing is avoided, but sealing effectiveness against atmospheric pressure is reduced
Solution Approach 1:
The patent divides the sealing function into two separate seals: the first seal (soft metallic) contacts the housing to prevent damage, while the second seal (radially outer) provides the primary sealing barrier against atmospheric pressure. This segmentation allows each seal to be optimized for its specific function without compromise.
Solution Approach 2:
The first soft metallic seal acts as an intermediary between the housing and the vacuum environment. It protects the housing from damage while the second seal provides the actual sealing function. The intermediary first seal absorbs the mechanical stress and protects both the housing and the critical sealing interface.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for the achievement and maintenance of ultra-high vacuum pressures below 10^-9 hPa with reduced outgassing and minimal damage to the sealing components, ensuring a reliable and cost-effective vacuum environment.
Implementation Method 1
at least one suction (53) is provided for evacuating at least one volume (51) located between the first seal (47) and the second seal (49)
Data Source
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AI summary
PROBLEM TO BE SOLVED: To provide an improved vacuum system capable of accomplishing a pressure in a region of an ultra high vacuum (UHV), in particular, a pressure lower than 10hPa within a receiver for a long period of time.SOLUTION: This invention relates to a vacuum system having a vacuum pump 23 and one receiver 25 in which an outlet opening part 39 provided in an outlet 37 is aligned with an inlet opening part 41 provided in an inlet 33, a part 43 of the outlet is faced against a part 45 of the inlet, a first seal 47 is provided between the inlet part and the outlet part, a second seal part 49 is provided outside in a radial direction of the first seal, the outlet of the receiver is removably connected with the inlet of the vacuum pump and there is provided a suction part 53 for drawing vacuum at least one volume part 51 enclosed between both seals 47 and 49 and the first seal is formed as soft metallic material or elastomer.SELECTED DRAWING: Figure 1