Soft X-Ray Optics With Integrated Filtering for Stray Light Rejection
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Solution Overview
Problem
Traditional x-ray based systems suffer from contamination by EUV, UV, visible, and IR light due to high reflectivity in these spectra, and current optical filters are fragile and costly, impacting the reliability and practical utility of soft x-ray systems.
Innovation Solution
Integrated optical filters with multiple layers are used to absorb radiation outside the desired energy band, suppressing reflectivity in IR, UV, and EUV spectra, and optionally include diffusion barriers to enhance longevity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If conventional filtering methods (absorptive filters, monochromators, crystal monochromators) are used to remove harmonics and filter x-rays, then harmonic removal and x-ray filtering are achieved, but the system becomes complex, expensive, and requires significant maintenance
Solution Approach 1:
The patent extracts the filtering function from complex conventional systems (absorptive filters, monochromators) and implements it through a simple bandpass filter circuit that processes the control signal. The bandpass filter removes harmonics by extracting only the fundamental frequency component, eliminating the need for physical x-ray filtering components while achieving the same harmonic removal effect.
Solution Approach 2:
The patent replaces mechanical/physical filtering systems (absorptive filters, crystal monochromators) with an electronic signal processing system. The bandpass filter circuit processes the control signal electronically to remove harmonic frequencies, substituting complex mechanical x-ray filtering apparatus with a simpler electronic filtering mechanism that achieves equivalent harmonic removal.
2Object-affected harmful factors
If conventional filtering methods are used, then x-ray filtering is achieved, but the system becomes expensive and requires significant maintenance
Solution Approach 1:
The patent extracts the x-ray filtering function from expensive physical filters and monochromators and implements it through electronic control. The bandpass filter circuit processes the control signal to ensure only the fundamental frequency drives the x-ray source, achieving x-ray filtering through signal processing rather than expensive physical filtering materials.
Solution Approach 2:
The patent replaces expensive physical x-ray filtering systems with an electronic signal processing approach. The bandpass filter circuit provides a low-cost, maintenance-free solution that electronically controls the x-ray generation process, eliminating the need for expensive filter materials and complex monochromator systems while reducing maintenance requirements.
3Object-affected harmful factors
If multiple filters and monochromators are used, then filtering performance is improved, but the device complexity and alignment requirements increase
Solution Approach 1:
The patent extracts the filtering performance function from multiple physical filters and monochromators and implements it through a single bandpass filter circuit. This electronic filtering approach achieves equivalent or superior filtering performance by processing the control signal to eliminate harmonics, without requiring multiple physical filtering components that would need alignment.
Solution Approach 2:
The patent replaces multiple mechanical filtering components requiring alignment with an electronic signal processing system. The bandpass filter circuit provides automatic frequency selection without mechanical alignment, eliminating the complexity of aligning multiple filters and monochromators while maintaining or improving filtering performance through electronic control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The integrated optical filters effectively propagate soft x-ray radiation while rejecting unwanted wavelengths, improving optical performance and extending the lifetime of x-ray systems without increasing costs.
Implementation Method 1
The control signal is processed by a bandpass filter having a passband that includes the fundamental frequency
Implementation Method 2
An x-ray source generates x-rays and harmonics when driven by a control signal
Data Source
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AI summary
Optical elements that efficiently propagate x-ray radiation over a desired energy range and reject radiation outside the desired energy range are presented herein. In one aspect, one or more optical elements of an x-ray based system include an integrated optical filter including one or more material layers that absorb radiation having energy outside the desired energy band. In general, the integrated filter improves the optical performance of an x-ray based system by suppressing reflectivity within infrared (IR), visible (vis), ultraviolet (UV), extreme ultraviolet (EUV) portions of the spectrum, or any other undesired wavelength region. In a further aspect, one or more diffusion barrier layers prevent degradation of the integrated optical filter, prevent diffusion between the integrated optical filter and other material layers, or both. In some embodiments, the thickness of one or more material layers of an integrated optical filter vary over the spatial area of the filter.