High-Voltage SOI IC Using Cascode Impedance Dividers
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Solution Overview
Problem
Current integrated circuit (IC) manufacturing processes are limited by maximum operating voltages, making it challenging to design components that can reliably operate at very high voltages beyond conventional specifications, such as above 1000 volts, without increasing component stress.
Innovation Solution
The use of a Silicon-On-Insulator (SOI) wafer, novel bias scheme, and series architecture with cascode configuration allows for the fabrication of ICs that can operate reliably at higher voltages by dielectrically isolating components and employing resistors as impedance dividers to create handle voltages, effectively extending the operating range without exceeding maximum voltage limits.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional IC manufacturing processes are used, then components can be fabricated with standard operating voltages, but the maximum operating voltage is limited to below 1000 volts
Solution Approach 1:
The patent divides the high-voltage circuit into multiple tubs (first tub, second tub, third tub) that are dielectrically isolated from each other using buried oxide layers and dielectric trenches. Each tub can operate at different voltage levels, allowing the overall circuit to handle very high voltages (1000V or higher) while each individual component remains within its maximum operating voltage limits. This segmentation enables the circuit to process voltages beyond what any single component could withstand alone.
Solution Approach 2:
The patent introduces dielectric materials (buried oxide layers and dielectric trenches) as intermediaries to electrically isolate different tubs and components. These dielectric structures act as mediators that allow high voltage potentials to exist between different regions without causing breakdown, enabling the circuit to operate at very high voltages while maintaining component safety. The dielectric isolation structures serve as the intermediary that makes high-voltage operation possible without exceeding component limits.
2Adaptability or versatility
If series connection is used to achieve higher voltages, then the operating voltage range increases, but component stress and complexity increase
Solution Approach 1:
The patent segments the voltage handling function across multiple dielectrically isolated tubs, where each tub processes a portion of the total voltage. This segmentation allows the circuit to achieve high voltage operation through parallel isolation rather than series connection of active components, reducing the stress on individual components and simplifying the overall architecture compared to traditional series connections.
Solution Approach 2:
The dielectric isolation structures automatically provide voltage distribution and stress management across the different tubs. Each tub self-manages its voltage level through the dielectric isolation, eliminating the need for complex external voltage division circuits or additional protective components that would be required in a series-connected architecture. The system serves itself by using the inherent properties of the dielectric materials to manage voltage distribution.
3Reliability
If dielectric isolation is used to isolate components, then component reliability improves, but manufacturing complexity increases
Solution Approach 1:
The patent combines multiple dielectric isolation techniques (buried oxide layers and dielectric trenches) into a unified isolation system that achieves comprehensive component isolation. By merging these different isolation methods, the patent creates a robust isolation architecture that ensures reliable electrical separation between tubs while utilizing standard semiconductor fabrication processes, thereby balancing reliability improvement with manufacturing feasibility.
Solution Approach 2:
The patent utilizes parameter changes in the dielectric materials (such as oxide thickness, dielectric constant, and material composition) to optimize the isolation effectiveness. By carefully controlling these parameters during fabrication, the patent achieves reliable electrical isolation between tubs using well-established semiconductor manufacturing techniques, avoiding the need for complex or non-standard fabrication processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables ICs to function reliably at significantly higher voltages than conventional processes allow, maintaining components within safe operating limits and allowing for scalable designs from 50 volts to 100 or 150 volts, with the maximum voltage limited by the buried oxide breakdown voltage.
Implementation Method 1
The technique involves growing a silicon dioxide insulating layer on a handle wafer, then bonding a silicon wafer onto the oxide layer to form a Silicon-On-Insulator (SOI) wafer structure. The tubs are thus electrically isolated from each other by the insulating trenches and BOX layer.
Implementation Method 2
growing a silicon dioxide insulating layer on a handle wafer
Data Source
AI summary
An integrated circuit (IC) fabricated on a Silicon-On-Insulator (SOI) wafer, having a plurality of impedance elements cascoded in series, each impedance elements having a specified value. A subset of the impedance elements are arranged to bias a first tub at a specified very high voltage (VHV) multiplied by a first predetermined ratio. A further subset of the impedance elements are arranged to bias a second tub at VHV multiplied by a second predetermined ratio and each of the impedance elements are further arranged to bias a handle and a third surrounding tub at VHV multiplied by a third predetermined ratio. A method for designing an integrated circuit using fully dielectrically isolated processes which function reliably at higher operating voltages than that provided by the conventional processes.


