SOI Package Stiffener Structure for Compact Reliable Manufacturing

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Solution Overview

Problem

Existing electronic packages and manufacturing methods are inadequate, leading to excess cost, decreased reliability, and large package sizes with relatively low performance.

Innovation Solution

The use of silicon on insulator (SOI) devices reinforced by stiffening structures, backed with mold material and semiconductor material, which are compatible with silicon saw techniques and provide good electrical and mechanical properties, reducing wear on saw blades and facilitating efficient manufacturing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional electronic packages and manufacturing methods are used, then manufacturing cost is reduced, but electrical performance and mechanical stability deteriorate

Engineering Contradiction:
Improveelectrical performance and mechanical stabilityVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent employs a composite structure consisting of a semiconductor device mounted on a substrate with a specific layered configuration including a first protective layer, a second protective layer, and a reinforcing structure. This composite architecture enhances both electrical performance and mechanical stability while maintaining compatibility with conventional manufacturing processes, thereby resolving the contradiction between improved reliability and manufacturing cost.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The package structure is divided into distinct functional segments: the semiconductor device, substrate, protective layers, and reinforcing structures. This segmentation allows each component to be optimized independently for its specific function while maintaining overall system performance, enabling improved reliability without proportionally increasing manufacturing complexity or cost.

Inventive Principle:
Principle #1Segmentation

2Strength

If package size is increased, then mechanical stability is improved, but device complexity and manufacturing cost increase

Engineering Contradiction:
Improvemechanical stabilityVSAvoidpackage size
Core Design Contradiction:
StrengthVSDevice complexity

Solution Approach 1:

Instead of uniformly increasing the entire package size, the patent applies reinforcing structures and protective layers selectively at critical locations where mechanical strength is most needed. This localized approach enhances mechanical stability without proportionally increasing overall package dimensions or complexity, allowing targeted reinforcement where it provides maximum benefit.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent enhances mechanical stability by adding structural elements in the vertical dimension (multiple protective layers and reinforcing structures stacked above the substrate) rather than only expanding horizontally. This dimensional approach improves strength without significantly increasing the package footprint, thereby managing complexity more effectively.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If manufacturing precision is improved, then electrical performance is enhanced, but manufacturing cost and process complexity increase

Engineering Contradiction:
Improveelectrical performanceVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent incorporates protective layers and reinforcing structures during the initial manufacturing stages, before final assembly. This preliminary action ensures that electrical performance-critical features are established with proper precision early in the process, while subsequent steps build upon this foundation without requiring additional high-precision operations, thereby managing overall manufacturing complexity.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The substrate and protective layers serve multiple functions simultaneously: providing mechanical support, enabling electrical connections, and offering environmental protection. This multi-functionality reduces the need for separate specialized components and processes, allowing improved electrical performance to be achieved through integrated design rather than additional complex manufacturing steps.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS20250336738A1Electronic devices and methods of manufacturing electronic devices
Publication Date: 2025.10.30 AMKOR TECH SINGAPORE HLDG PTE LTD
  • US20250336738A1 patent drawing
  • US20250336738A1 patent drawing
  • US20250336738A1 patent drawing

AI summary

In one example, an electronic device can include an active region, a buried oxide layer over the active region, and a stiffener disposed over first end of the buried oxide layer and a second end of the buried oxide layer opposite the first end. Inner sidewalls of the stiffener can define a cavity over the buried oxide layer. A passivation layer can be disposed on the inner sidewalls of the stiffener, in the cavity, and over the buried oxide layer. A body can be disposed over the passivation layer and in the cavity. Other examples and related methods are also disclosed herein.