SOI Sensor Chip with Integrated Photodiode for Luminescence Detection

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Solution Overview

Problem

Existing biochemical and biological sensing technologies face challenges in achieving high sensitivity, scalability, and cost-effectiveness for rapid, point-of-need detection of particles in various analyte fluids, including liquid and gaseous samples.

Innovation Solution

A sensor chip utilizing a silicon-on-insulator substrate with a monolithically integrated lateral photodiode and functionalized coating on the photosensor surface, capable of detecting characteristic light emissions from captured particles, combined with optional integration of additional photonic sensors for enhanced detection capabilities.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional sensing technologies are used, then detection capability is achieved, but sensitivity and detection limit are insufficient for rapid point-of-need testing

Engineering Contradiction:
Improvedetection sensitivityVSAvoidsystem complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent merges multiple functions (sensing, signal transduction, and detection) into a single integrated photonic sensor chip. The sensor chip integrates a photonic sensor element with a photodiode for signal transduction and readout circuitry, eliminating the need for separate components and achieving high sensitivity detection at point-of-need applications

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The photonic sensor chip is designed with multi-functionality to detect various biochemical and biological particles including bacteria, viruses, proteins, and small molecules. The universal detection platform uses functionalized coatings that can be adapted to capture different analytes, providing broad applicability while maintaining high detection sensitivity

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Measurement precision

If high sensitivity detection is achieved, then detection limit is reduced, but scalability and cost-effectiveness are compromised

Engineering Contradiction:
Improvedetection limitVSAvoidscalability and cost
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The patent replaces complex mechanical or chemical sensing systems with a photonic-based detection system. The photonic sensor uses optical fields for detection, enabling high sensitivity measurements while allowing for scalable manufacturing using standard photonic fabrication processes and CMOS-compatible technologies

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent utilizes changes in optical parameters (refractive index, absorption, fluorescence) of the analyte particles to achieve high sensitivity detection. By monitoring these optical parameter changes through the photonic sensor, the system achieves low detection limits while maintaining compatibility with cost-effective manufacturing approaches

Inventive Principle:
Principle #35Parameter changes

3Productivity

If rapid detection is implemented, then testing speed is increased, but measurement precision and sensitivity are reduced

Engineering Contradiction:
Improvetesting speedVSAvoidmeasurement accuracy
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The patent employs preliminary functionalization of the sensor surface with capturing agents (antibodies, aptamers, or other recognition elements) before analyte exposure. This pre-preparation enables immediate specific binding and detection upon analyte introduction, achieving rapid results without compromising measurement precision

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The photonic sensor enables continuous monitoring of analyte binding in real-time, allowing for rapid detection while maintaining high measurement precision. The continuous optical measurement process captures binding events as they occur, providing both speed and accuracy

Inventive Principle:
Principle #20Continuity of useful action

4Reliability

If photonic sensor elements are integrated, then electromagnetic interference resistance is improved, but manufacturing complexity increases

Engineering Contradiction:
Improveelectromagnetic interference resistanceVSAvoidintegration complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent integrates the photonic sensor element, photodiode for signal transduction, and readout circuitry into a single monolithic chip structure. This merging provides inherent electromagnetic interference resistance due to the optical detection mechanism while managing integration complexity through co-fabrication processes

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The sensor chip provides high sensitivity, scalability, and cost-effectiveness for rapid detection of biochemical and biological particles, suitable for applications like water analysis, environmental monitoring, and food diagnostics, with the ability to integrate with CMOS processing technologies.

Implementation Method 1

The photodiode is sensitive to detect, upon capture of one or more of the particles to be sensed by the capturing agent, characteristic light emission or a characteristic change in light emission from the surface functionalization layer in response to supplied excitation energy

Methodology Applied
Scientific EffectPhotoluminescence: Photoluminescence

Data Source

PatentEP4579215A1Chip-integrated luminescence detection for chemical, biological or biochemical sensing
Publication Date: 2025.07.02 IHP GMBH INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS LEIBNIZ INSTITUT FÜR INNOVATIVE MIKROELEKTRONIK
  • EP4579215A1 patent drawingFigure 1
  • EP4579215A1 patent drawingFigure 2
  • EP4579215A1 patent drawingFigure 3

AI summary

A sensor chip for detecting a presence of chemical, biochemical or biological particles to be sensed in an analyte fluid comprises at least one cavity extending from the back side of an SOI substrate through its base and buried oxide layers to expose a back surface of the silicon layer. At least one monolithically integrated lateral photodiode comprises a lateral layer sequence of active photodiode layers, forming an integral part of the exposed back surface defining a photosensor surface. A functionalized coating either comprises a capturing agent, a preloaded capturing agent with labelled analyte combination or is configured to immobilize a capturing agent upon exposure of the surface functionalization layer to the capturing agent, for selectively capturing the particles to be sensed from an analyte fluid upon exposure of the functionalization layer to the analyte fluid. The photodiode is sensitive to detect, upon capture of one or more of the particles to be sensed by the capturing agent, a characteristic light emission or a characteristic change in light emission from the surface functionalization layer in response to supplied excitation energy.