Sol Gel Coated Support Ring Blocks Radiation Noise
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Solution Overview
Problem
Current thermal processing chambers in the semiconductor industry face challenges in achieving uniform and repeatable temperature control and measurement due to thermal absorptions and light emissions by chamber components, which complicates local layer formation conditions and minimizes uniform processing of semiconductor substrates.
Innovation Solution
A support member for a thermal processing chamber with a silicon oxide body and a sol coating on its non-radiation-facing side, featuring a layered structure with silica, silicon, and a cap layer, designed to block radiation detectable by temperature sensors, thereby improving temperature detection accuracy and reducing radiation noise.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If pyrometers are used to measure substrate temperature, then temperature measurement is enabled, but radiation from chamber components interferes with measurement accuracy
Solution Approach 1:
A radiation shield comprising a support ring and support legs is introduced as an intermediary component between the chamber walls and the substrate/pyrometer line of sight. The shield blocks radiation from chamber components while allowing the pyrometer to measure substrate temperature accurately, eliminating the harmful radiation interference without compromising measurement capability.
Solution Approach 2:
The radiation shield is segmented into multiple components including a support ring, multiple support legs positioned at different locations, and optional vertical extensions. This segmentation allows the shield to effectively block radiation from various chamber walls while maintaining visibility and thermal access for the substrate processing areas.
2Stability of the object's composition
If chamber components are present for structural support, then mechanical stability is provided, but thermal absorption and light emission interfere with temperature control and measurement
Solution Approach 1:
The radiation shield acts as a mediating structure that provides mechanical support stability while simultaneously blocking the harmful thermal radiation and light emissions from chamber components. The shield's strategic positioning and design allow it to fulfill both structural and radiative shielding functions without compromising either aspect.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sol coating enhances temperature control and measurement precision, leading to more uniform and repeatable thermal processing of semiconductor substrates by minimizing radiation interference and improving the accuracy of temperature sensors.
Implementation Method 1
The sol coating may have a silica layer, a silicon layer, and a cap layer. The layer structure may have a graded composition, and may have one or more transition layers.
Data Source
AI summary
A support member for a thermal processing chamber is described. The support member has a sol coating on at least one surface. The sol coating contains a material that blocks a desired wavelength or spectrum of radiation from being transmitted by the material of the support member. The sol coating may be a multi-layer structure that may include adhesion layers, transition layers, and cap layers, in addition to radiation-blocking layers.