Sol-Gel Coated Ceramic Member for Particle Scattering Control
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Solution Overview
Problem
Existing ceramic members used in high-temperature and corrosive environments, such as semiconductor production equipment, face challenges in preventing particle scattering due to fine particles and microcracks, which are difficult to remove from recessed portions and grain boundaries, leading to reduced equipment lifespan and product quality.
Innovation Solution
A surface-treated ceramic member with a sol-gel coating film of silicon alkoxide compound polymer is applied selectively to recessed portions of a ceramic sintered body, anchoring fine particles and preventing microcrack detachment, while maintaining the ceramic's corrosion resistance and mechanical properties.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-generated harmful factors
If a coating film is formed on the entire surface of a ceramic member to prevent particle scattering, then particle scattering is suppressed, but the ceramic member's corrosion resistance deteriorates
Solution Approach 1:
The patent applies coating film selectively only to recessed portions (pores, microcracks, machining scratches) of the ceramic member surface rather than the entire surface. This localized coating approach prevents particle scattering from recessed areas while preserving the corrosion resistance of the bulk ceramic surface, thus resolving the contradiction between particle suppression and corrosion protection
2Object-generated harmful factors
If the ceramic member is processed to high precision to eliminate recessed portions, then particle scattering is reduced, but manufacturing complexity and cost increase
Solution Approach 1:
The patent employs a preliminary cleaning process using a solvent and film method to remove particles from recessed portions before the coating step. This preliminary action reduces the number of particles in recessed areas, allowing the subsequent coating to be more effective with thinner material application, thereby reducing overall manufacturing complexity compared to requiring ultra-precision processing to eliminate all recessed portions
3Object-generated harmful factors
If the ceramic member is subjected to heat treatment to repair microcracks, then particle scattering is reduced, but energy consumption and processing time increase
Solution Approach 1:
The patent introduces a coating film as an intermediary material that fills and seals recessed portions including microcracks. This coating layer acts as a mediator that prevents particle scattering without requiring high-temperature heat treatment to repair the microcracks, thereby significantly reducing energy consumption while achieving the same particle suppression effect
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents particle scattering and maintains the ceramic's corrosion resistance, reducing the need for frequent re-coating and lowering operational costs by anchoring particles and microcracks, thus ensuring prolonged equipment performance and product quality.
Implementation Method 1
a sol-gel coating film of a silicon alkoxide compound polymer formed selectively on recessed portions of a ceramic sintered body
Implementation Method 2
anchoring fine particles and preventing microcrack detachment
Data Source
AI summary
Disclosed is a surface-treated ceramic member which has a coating film-formed surface comprising a ceramic sintered body with a porosity of 1% or less and a sol-gel coating film of a silicon alkoxide compound polymer formed on at least a part of a ceramic sintered body, wherein the coating film and the surface of the body are coexistent in the coating film-formed surface. Specifically the area of the sol-gel coating film accounts for 5 to 80% of the total area of the coating film-formed surface. The surface-treated ceramic member has excellent corrosion resistance and is free from scattering of particles.