Solar Cell Back Structure With Refractive-Index Graded Passivation

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Solution Overview

Problem

The existing aluminum oxide + silicon nitride film layer structure in solar cells fails to achieve high field passivation and H passivation requirements, affecting performance indices such as Uoc, Isc, Eta, and conversion efficiency.

Innovation Solution

A back structure for solar cells comprising an aluminum oxide film layer with successively deposited silicon nitride and silicon oxynitride film layers, where the refractive index of the silicon nitride film layers is greater than that of the silicon oxynitride film layers, and an alternate arrangement is used to improve passivation and performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If an aluminum oxide and silicon nitride film layer structure is used on the back surface, then interface passivation and reflection increase are achieved, but higher field passivation and H passivation requirements cannot be met

Engineering Contradiction:
Improvepassivation effectVSAvoidfilm layer structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The back surface film structure is segmented into multiple thin layers: aluminum oxide film (5-15 nm), first silicon nitride film (15-30 nm), first silicon oxynitride film (10-20 nm), and second silicon nitride film (20-40 nm). This segmentation allows each layer to contribute differently to passivation and optical properties, achieving superior field passivation and H passivation effects that a simple two-layer structure cannot provide.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent uses a composite film structure combining aluminum oxide, silicon nitride, and silicon oxynitride materials. Each material brings unique properties: aluminum oxide provides excellent field passivation, silicon nitride provides good H passivation and high refractive index, and silicon oxynitride provides intermediate properties. The composite structure achieves synergistic effects that improve overall passivation performance beyond what single materials can deliver.

Inventive Principle:
Principle #40Composite materials

2Productivity

If the refractive index decreases from inner to outer layers, then light reflection is optimized and passivation is enhanced, but the manufacturing precision requirements increase

Engineering Contradiction:
Improveconversion efficiencyVSAvoidfilm thickness control
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent optimizes specific parameter ranges for each layer to balance performance and manufacturability: aluminum oxide film (5-15 nm), first silicon nitride film (15-30 nm), first silicon oxynitride film (10-20 nm), and second silicon nitride film (20-40 nm). These parameter ranges are carefully selected to achieve the desired refractive index gradient while remaining within controllable manufacturing tolerances for PECVD processes.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the passivation and performance of solar cells by improving Uoc, Isc, FF, and Eta, and increases energy conversion efficiency, applicable to both double-sided and single-sided PERC and TOPCon solar cells.

Implementation Method 1

an aluminum oxide+silicon nitride structure is generally used to process the back face... internal reflection of long-wave light

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

A refractive index of the first silicon nitride film layer is greater than a refractive index of the first silicon oxynitride film layer... alternate arrangement of the silicon oxynitride film layer and the silicon nitride film layer is realized; and a refractive index of the intermediate silicon oxynitride film layer is less than a refractive index of the silicon nitride film layers on the two sides

Methodology Applied
Scientific EffectRefraction: Refraction

Implementation Method 3

Deposition of silicon nitride on a back surface of a solar photovoltaic cell using a Plasma Enhanced Chemical Vapor Deposition (PECVD) technology

Methodology Applied
Scientific EffectPlasma Enhanced Chemical Vapor Deposition: Plasma Enhanced Chemical Vapour Deposition

Data Source

PatentUS20240014329A1Back Structure of Solar Cell, and Solar Cell with Back Structure
Publication Date: 2024.01.11 CHINT NEW ENERGY TECH CO LTD

AI summary

Some embodiments of the present disclosure provide a back structure of a solar cell. The back structure includes an aluminum oxide film layer disposed on a silicon wafer substrate, and a first silicon nitride film layer and a first silicon oxynitride film layer, which are successively disposed on the aluminum oxide film layer from inside to outside; and the back structure further includes a second silicon nitride film layer disposed on the first silicon oxynitride film layer. The refractive index of the first silicon nitride film layer is greater than that of the second silicon nitride film layer, and the refractive index of the second silicon nitride film layer is greater than that of the first silicon oxynitride film layer.