Solar Cell ALD-PECVD Passivation for Efficient Layer Formation
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Solution Overview
Problem
The existing passivation layers in solar cells do not effectively balance passivation effect and forming efficiency, leading to suboptimal photoelectric conversion efficiency.
Innovation Solution
A dual-layer passivation structure is implemented, where the first passivation layer, formed using ALD, has a higher atomic packing density and thinner average thickness than the second passivation layer, formed using PECVD, to enhance passivation effect while maintaining efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a passivation layer is formed to enhance photoelectric conversion efficiency, then the passivation effect is improved, but the forming efficiency and productivity are reduced
Solution Approach 1:
The passivation layer is divided into two distinct layers: a first passivation layer formed by ALD with high atomic packing density and low hydrogen content for superior passivation effect, and a second passivation layer formed by PECVD with lower atomic packing density and higher hydrogen content for faster deposition. This segmentation allows each layer to optimize for its specific function, resolving the contradiction between passivation quality and forming efficiency.
Solution Approach 2:
The invention changes the deposition parameters by using two different deposition methods (ALD and PECVD) with distinct characteristics. ALD provides low deposition rate but high film quality (high atomic packing density, low hydrogen content), while PECVD provides high deposition rate but lower film quality. By combining these parameter regimes in a dual-layer structure, the patent achieves both high passivation effect and high forming efficiency.
2Reliability
If the passivation layer thickness is increased to improve coverage, then the passivation effect is enhanced, but the manufacturing complexity and time are increased
Solution Approach 1:
The total passivation layer thickness is segmented into two functional layers with different thickness optimizations. The first passivation layer is thinner (optimized for interface passivation) while the second passivation layer is thicker (optimized for coverage and protection). This segmentation allows achieving sufficient total coverage without requiring either layer to be excessively thick, thus reducing total manufacturing time while maintaining passivation effectiveness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The dual-layer structure improves photoelectric conversion efficiency by reducing recombination rates and ensuring reliable coverage without compromising productivity.
Implementation Method 1
the first passivation layer, formed using ALD
Implementation Method 2
the second passivation layer, formed using PECVD
Implementation Method 3
the present application relates to the field of photovoltaic power generation technology
Data Source
AI summary
The present application relates a solar cell, a photovoltaic device and a photovoltaic system. The solar cell includes a substrate, a first passivation layer, and a second passivation layer. The substrate includes a first surface and a second surface opposite to each other along a thickness direction of the substrate. The first passivation layer is disposed on the first surface of the substrate. The second passivation layer is disposed on a side of the first passivation layer away from the substrate. A material of the first passivation layer is the same as that of the second passivation layer. An atomic packing density of the first passivation layer is higher than that of the second passivation layer. An average thickness of the first passivation layer is smaller than that of the second passivation layer.