Solar Cell Integrated CIS Structure Without Support Carrier

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Solution Overview

Problem

The fabrication of complementary metal-oxide-semiconductor (CMOS) image sensors (CIS) is complicated by the use of a support carrier that requires grinding and polishing, increasing production costs and complexity.

Innovation Solution

Integrating a solar cell with the CIS sensor array, where the solar cell acts as a support substrate and power supply, storing DC voltage in a metal-insulator-metal (MIM) capacitor and converting it to AC signals for the CIS sensor array, reducing the need for a separate power source.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a support carrier is used for CMOS image sensor fabrication, then the sensor array can be properly supported during processing, but additional grinding and polishing steps are required to reduce the carrier's presence, increasing manufacturing complexity

Engineering Contradiction:
Improvesupport carrier functionalityVSAvoidfabrication process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges the support carrier function with the final device structure by integrating a solar cell array that serves both as structural support and as a functional power-generating component. This eliminates the need for separate support carriers that require removal, thereby reducing fabrication process complexity while maintaining reliability

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The solar cell array performs multiple functions: it provides mechanical support for the CMOS sensor array, generates electrical power through photovoltaic conversion, and eliminates the need for separate power supply components. This multi-functionality reduces the overall device complexity and fabrication steps required

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Use of energy by moving object

If a separate power source is integrated with the CMOS image sensor, then the sensor array has sufficient power supply, but additional components and integration steps increase manufacturing complexity

Engineering Contradiction:
Improvepower supply for sensor arrayVSAvoidintegration steps
Core Design Contradiction:
Use of energy by moving objectVSDevice complexity

Solution Approach 1:

The patent combines the power generation function directly into the support structure by using a solar cell array that is integrated with the CMOS sensor array. This merging eliminates the need for separate power source components and their associated integration steps, reducing manufacturing complexity while ensuring adequate power supply

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The solar cell array provides self-powered operation by converting incident light directly into electrical energy that supplies the CMOS sensor array. This self-service capability eliminates the need for external power sources or complex power management components, thereby reducing device complexity

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This integration simplifies the fabrication process, reduces production costs, and provides a self-sufficient power supply for the CIS sensor array, enhancing efficiency and reducing complexity.

Implementation Method 1

a first array of solar cells integrated with the CIS sensor array, wherein the solar cells are configured to convert light to electricity

Methodology Applied
Scientific EffectPhotovoltaic effect: Photovoltaic Effect

Implementation Method 2

storing DC voltage in a metal-insulator-metal (MIM) capacitor

Methodology Applied
Scientific EffectCapacitance: Capacitance

Data Source

PatentUS20250318313A1Integration of solar cell and image sensor
Publication Date: 2025.10.09 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250318313A1 patent drawing
  • US20250318313A1 patent drawing
  • US20250318313A1 patent drawing

AI summary

The present disclosure provides an integrated circuit (IC) structure with a solar cell and an image sensor array. An integrated structure according to the present disclosure includes a first substrate including a plurality of photodiodes, an interconnect structure disposed on the first substrate, a first bonding layer disposed on the interconnect structure, a second bonding layer disposed on the first bonding layer, a second substrate disposed on the second bonding layer, and a transparent conductive oxide layer disposed on the second substrate.