Solar Cell Doping Profile Control via Pre-amorphization

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Solution Overview

Problem

The efficiency of solar cells is reduced due to the difficulty in controlling the doping profile of the dopant layer, leading to deteriorated properties and reduced performance.

Innovation Solution

A solar cell design that incorporates a pre-amorphization element with varying concentrations in different portions of the dopant layer, allowing for controlled ion-implantation of conductive type dopants to optimize the doping profile and enhance efficiency, including the use of a semiconductor substrate with textured surfaces to reduce optical loss.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional doping methods are used to form a dopant layer, then the solar cell can be manufactured with standard processes, but the doping profile cannot be easily controlled and properties deteriorate

Engineering Contradiction:
Improvedoping profile controlVSAvoiddoping process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

An amorphous layer is formed on the semiconductor substrate before dopant ion-implantation. This preliminary action modifies the substrate structure to enable precise dopant placement and controlled diffusion, solving the doping profile control problem while maintaining process feasibility

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The amorphous layer is formed selectively in specific regions where precise doping control is needed. This local modification allows different doping profiles in different areas of the substrate, enabling optimized electrical properties without complicating the entire manufacturing process

Inventive Principle:
Principle #3Local quality

2Productivity

If the dopant layer properties deteriorate due to poor doping profile control, then manufacturing is simpler, but solar cell efficiency is reduced

Engineering Contradiction:
Improvesolar cell efficiencyVSAvoiddopant layer properties
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The physical and chemical parameters of the semiconductor substrate are changed by forming an amorphous layer, which alters dopant diffusion behavior and enables precise control of doping profiles. This parameter change improves both efficiency and reliability simultaneously

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

Conventional thermal diffusion methods are replaced with ion-implantation techniques. This substitution provides precise control over dopant concentration and depth distribution, ensuring reliable dopant layer properties and high solar cell efficiency

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Ease of operation

If uniform dopant concentration is used throughout the dopant layer, then manufacturing is easier, but current density and electrical properties are suboptimal

Engineering Contradiction:
Improvedoping process simplicityVSAvoiddoping profile precision
Core Design Contradiction:
Ease of operationVSManufacturing precision

Solution Approach 1:

The amorphous layer enables spatially varying dopant concentrations within the dopant layer. Different regions can have optimized doping levels tailored to their specific functional requirements, achieving high precision doping profiles while the overall process remains manageable

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The controlled doping profile and textured surfaces increase the current density and reduce contact resistance, resulting in enhanced solar cell efficiency and improved electrical properties.

Implementation Method 1

ion-implanting a pre-amorphization element to form an amorphous layer at at least a part of one surface of the semiconductor substrate

Methodology Applied
Scientific EffectIon implantation: Ion Implantation

Implementation Method 2

ion-implanting a pre-amorphization element to form an amorphous layer

Methodology Applied
Scientific EffectAmorphization: Vitrification

Implementation Method 3

ion-implanting a first conductive type dopant to the one surface of the semiconductor substrate to form a first dopant layer

Methodology Applied
Scientific EffectIon implantation: Ion Implantation

Implementation Method 4

textured surfaces to reduce optical loss

Methodology Applied
Scientific EffectLight scattering: Scattering

Data Source

PatentUS9978888B2Solar cell and method for manufacturing the same
Publication Date: 2018.05.22 JINKOSOLAR MIDDLE EAST FZCO
  • US9978888B2 patent drawing
  • US9978888B2 patent drawing
  • US9978888B2 patent drawing

AI summary

A method for manufacturing a solar cell, the method including: preparing a semiconductor substrate; ion-implanting a pre-amorphization element to form an amorphous layer at at least a part of one surface of the semiconductor substrate; ion-implanting a first conductive type dopant to the one surface of the semiconductor substrate to form a first dopant layer; and forming a first electrode electrically connected to the first dopant layer, wherein a concentration of the pre-amorphization element in one portion of the first dopant layer is different from a concentration of the pre-amorphization element in another portion of the first dopant layer.