Solar Cell-Powered Electrostatic Chuck for Semiconductor Processing
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Solution Overview
Problem
Existing electrostatic chucks in semiconductor and liquid crystal manufacturing require external power supplies, leading to limitations in mobility and potential contamination risks due to battery recharging and leakage, and necessitate larger internal power supplies.
Innovation Solution
Integration of a solar cell as an internal power supply within the electrostatic chuck, converting optical energy generated during substrate processing into electrical energy to power the attraction electrode, eliminating the need for external power and reducing the size of the internal power supply.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If an external power supply is used to power the attraction electrode, then the electrostatic chuck can generate sufficient attraction force, but the physical range of use is limited by the installed location of the external power supply
Solution Approach 1:
The patent combines the power supply function with the electrostatic chuck body by integrating a battery into the chuck structure. This merging eliminates the need for external power supply connections and enables mobility, as the chuck can now be moved and transported while maintaining substrate holding capability.
2Ease of operation
If a battery is provided as the internal power supply, then mobility is improved, but the internal power supply must be made larger to secure sufficient power
Solution Approach 1:
The patent employs a rechargeable battery that can be recharged during or after substrate processing, enabling dynamic power management. This allows the use of a smaller battery capacity while maintaining sufficient operating time, as the battery can be replenished rather than requiring large initial capacity.
Solution Approach 2:
The rechargeable battery system enables continuous operation by allowing recharging during idle periods between substrate processing steps. This continuity eliminates downtime and allows the use of smaller battery capacity since the battery is repeatedly recharged rather than requiring sufficient capacity for extended uninterrupted operation.
3Ease of operation
If a rechargeable battery is used as internal power supply, then mobility is enabled, but there are possibilities of contamination due to reagent leakage and influences from leakage current
Solution Approach 1:
The patent removes the harmful elements associated with rechargeable batteries (reagent leakage and leakage current) by switching to a solar cell power supply. This extraction of the power source from battery-based technology eliminates the contamination risks while preserving the mobility benefit of having an internal power supply.
4Loss of energy
If optical energy generated during substrate processing is not utilized, then energy is wasted, but converting it requires additional components
Solution Approach 1:
The solar cell is positioned to receive optical energy generated during substrate processing (such as plasma glow or lamp radiation), and this energy is directly used to recharge the battery or power the attraction electrode. The system serves itself by converting waste optical energy into useful electrical energy, eliminating the need for external power sources.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solar cell-powered electrostatic chuck provides a self-sustaining power source, preventing battery exhaustion, reducing equipment contamination, and enabling long-term reliable operation without external power supply constraints.
Implementation Method 1
converting optical energy generated during substrate processing into electrical energy
Implementation Method 2
an electric charge and an electric field are formed on a surface of the electrode sheet, and with this surface serving as a substrate attracting surface, the substrates is attracted with electrical force
Data Source
Figure 1
Figure 2
AI summary
Provided is an electrostatic chuck (8) of self power supply type, which is capable of supplying power while generating power to be used by an attraction electrode (3) during processing of a substrate. The electrostatic chuck (8) attracts and holds a substrate in a substrate processing apparatus (11) that processes the substrate while generating optical energy. The electrostatic chuck (8) includes: an electrode sheet (5) including an attraction electrode (3); a metal base (1) having the electrode sheet (5) laminated on an upper surface side thereof; an internal power supply for obtaining power to be supplied to the attraction electrode (3) ; and a voltage boost circuit (7) for boosting voltage of the power obtained by the internal power supply. The internal power supply includes a solar cell (6), and converts the optical energy into the power during the processing of the substrate, to thereby cause the electrode sheet (5) to attract and hold the substrate.