Solar Cell Fabrication Using Integrated Circuit Infrastructure

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Solution Overview

Problem

The high cost of fabricating solar cells has limited their widespread use, necessitating a more economical approach to their production.

Innovation Solution

Integrating solar cell fabrication into conventional integrated circuit chip fabrication facilities, utilizing scrap wafers and existing semiconductor processes to form P-doped and N-doped layers, applying dielectric passivation and antireflective coatings, and forming metal silicide contacts and bus bars, while singulating the substrate into solar cell chips.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If conventional solar cell fabrication processes are used, then solar cells can be produced, but the fabrication cost is high

Engineering Contradiction:
Improvefabrication costVSAvoidproduction quality
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent applies universality by using a single fabrication facility to produce both integrated circuit chips and solar cells. The semiconductor manufacturing equipment and processes are utilized for dual purposes, allowing solar cells to be manufactured using existing IC fabrication infrastructure, thereby reducing solar cell production costs while maintaining quality through proven manufacturing processes

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent employs parameter changes by modifying the doping concentrations and layer structures within the semiconductor fabrication process to create solar cell junctions. By adjusting process parameters such as dopant levels, deposition thicknesses, and thermal treatment conditions, the same fabrication equipment produces solar cell structures with optimized electrical and optical properties

Inventive Principle:
Principle #35Parameter changes

2Productivity

If dedicated solar cell fabrication facilities are used, then solar cell production can be optimized, but infrastructure costs increase

Engineering Contradiction:
Improvesolar cell production efficiencyVSAvoidfabrication infrastructure
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent eliminates the need for dedicated solar cell fabrication facilities by making semiconductor manufacturing equipment universal. The same tools and facilities that produce integrated circuit chips are used to manufacture solar cells, thereby maintaining production efficiency while avoiding the complexity and cost of building separate specialized infrastructure

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent merges solar cell fabrication into the existing integrated circuit manufacturing workflow. By combining both production processes into a single facility with shared equipment, the patent achieves solar cell production efficiency without duplicating infrastructure, thereby reducing overall system complexity and cost

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method reduces the cost of solar cell production by leveraging existing infrastructure and processes, enabling efficient and cost-effective fabrication of solar cells.

Implementation Method 1

Solar cells or solar concentrators are semiconductor devices capable of generating electricity using the photovoltaic effect

Methodology Applied
Scientific EffectPhotovoltaic effect: Photovoltaic Effect

Implementation Method 2

forming a dielectric top passivation layer on the top surface of the substrate and a dielectric bottom passivation layer on the top surface of the substrate

Methodology Applied
Scientific EffectDielectric insulation: Dielectric

Implementation Method 3

forming an antireflective coating on the top passivation layer

Methodology Applied
Scientific EffectAnti-reflection: Anti-Reflective Coating

Implementation Method 4

forming first metal silicide contacts to the P-doped layer and second metal silicide contacts to the N-doped layer

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS7897434B2Methods of fabricating solar cell chips
Publication Date: 2011.03.01 INTERNATIONAL BUSINESS MACHINE CORPORATION
  • US7897434B2 patent drawing
  • US7897434B2 patent drawing
  • US7897434B2 patent drawing

AI summary

A method of fabricating solar cell chips. The method includes creating an integrated circuit chip process route for fabricating integrated circuit chips using integrated circuit wafers in an integrated circuit fabrication facility; creating a solar cell process route for fabricating solar cells using solar cell wafers in the integrated circuit fabrication facility; releasing integrated circuit chip wafers and solar cell wafers into tool queues of tools of the an integrated circuit fabrication facility; and processing the solar cell wafers on at least some tools of the integrated circuit fabrication facility used to process the integrated circuit wafers. Also the process used to fabricate the solar cell chips.