Solar Cell Aluminum Oxide Passivation With Fire-Through Contacts

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Aluminum oxide films used in solar cells have poor fire-through capability during electrode formation, leading to increased electric resistance and complex, costly manufacturing processes, which hinder the production of high-efficiency solar cells with low costs.

Innovation Solution

A solar cell design featuring a passivation layer with an aluminum oxide film of up to 40 nm thickness, allowing for effective fire-through capability during electrode formation without the need for expensive patterning techniques or high-temperature annealing, using a conductive paste that penetrates through the film to establish electrical contact.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If aluminum oxide film is used for passivation layer, then passivation performance is improved, but fire-through capability deteriorates leading to increased electric resistance

Engineering Contradiction:
Improvepassivation performanceVSAvoidfire-through capability
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent changes the thickness parameter of the aluminum oxide film from conventional thicker layers to a specific thin range of 5-40 nm. This parameter change enables the film to maintain excellent passivation performance while allowing conductive paste to penetrate through during the firing process, thereby resolving the contradiction between passivation quality and fire-through capability.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If conventional aluminum oxide film is used, then passivation is achieved, but additional annealing steps are required increasing manufacturing complexity

Engineering Contradiction:
ImprovepassivationVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges the passivation layer formation and electrode formation processes into a single integrated step. The thin aluminum oxide film (5-40 nm) is designed to be penetrable by conductive paste during normal firing temperature, eliminating the need for separate annealing steps. This combines multiple functions into one process, reducing manufacturing complexity while maintaining passivation effectiveness.

Inventive Principle:
Principle #5Merging (Combining)

3Reliability

If thicker aluminum oxide film is used, then passivation coverage is improved, but electrode contact resistance increases

Engineering Contradiction:
Improvepassivation coverageVSAvoidelectrode contact resistance
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent optimizes the thickness parameter of the aluminum oxide film to a specific range of 5-40 nm. This precise parameter control ensures sufficient passivation coverage while maintaining adequate fire-through capability for electrode contact. The thin film thickness allows conductive paste to penetrate and establish good electrical contact without compromising the passivation function.

Inventive Principle:
Principle #35Parameter changes

4Manufacturing precision

If expensive patterning techniques are used to form electrodes through aluminum oxide film, then electrode contact is improved, but manufacturing cost increases

Engineering Contradiction:
Improveelectrode contactVSAvoidmanufacturing cost
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent changes the thickness parameter of the aluminum oxide film to 5-40 nm, which enables conventional screen printing and firing processes to achieve adequate electrode contact without requiring expensive additional patterning techniques. This parameter optimization allows standard manufacturing equipment and processes to be used, significantly reducing manufacturing costs while maintaining acceptable electrode contact quality.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables satisfactory passivation and tight electrical contact between the substrate and electrodes, reducing manufacturing costs and improving solar cell efficiency by eliminating the need for additional annealing steps and expensive materials.

Implementation Method 1

A layer including an aluminum oxide film having a thickness of up to 40 nm is formed as the passivation layer, which provides for a fire-through capability during electrode formation

Methodology Applied
Scientific EffectFire-through capability:

Implementation Method 2

Silicon nitride and analogous films are known to have positive charges and thus exert the field effect passivation

Methodology Applied
Scientific EffectField effect passivation:

Data Source

PatentUS12191406B2Solar cell, method for manufacturing solar cell, and solar cell module
Publication Date: 2025.01.07 SHIN ETSU CHEMICAL CO LTD
  • US12191406B2 patent drawing
  • US12191406B2 patent drawing
  • US12191406B2 patent drawing

AI summary

A solar cell is provided with: a semiconductor substrate having a light-receiving surface and a non-light-receiving surface; a PN junction section formed on the semiconductor substrate; a passivation layer formed on the light-receiving surface and/or the non-light-receiving surface; and power extraction electrodes formed on the light-receiving surface and the non-light-receiving surface. The solar cell is characterized in that the passivation layer includes an aluminum oxide film having a thickness of 40 nm or less. As a result of forming a aluminum oxide film having a predetermined thickness on the surface of the substrate, it is possible to achieve excellent passivation performance and excellent electrical contact between silicon and the electrode by merely firing the conductive paste, which is conventional technology. Furthermore, an annealing step, which has been necessary to achieve the passivation effects of the aluminum oxide film in the past, can be eliminated, thus dramatically reducing costs.