Solar Cell Gas Delivery System With Angled Injectors
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Solution Overview
Problem
Current equipment for manufacturing photovoltaic (PV) solar cells and thin film (TF) modules faces issues such as high cost, low throughput, large footprint, non-uniform gas supply, and inefficient exhaust of reaction by-products, leading to increased manufacturing costs and reduced efficiency, which hampers the competitiveness of PV solar energy systems.
Innovation Solution
A gas delivery system with multiple injectors having holes arranged at varying angles and a gas exhaust system with manifolds having holes at specific angles are used to ensure uniform exposure of gases to substrates, optimizing gas distribution and by-product removal within a processing enclosure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If traditional gas delivery systems are used in substrate processing equipment, then the equipment structure is simple, but the gas supply is non-uniform across substrates
Solution Approach 1:
The gas delivery system is divided into multiple separate injectors, each with multiple holes positioned at different locations and angles. This segmentation allows each injector to target specific zones of the substrate, enabling precise control of gas distribution across the entire substrate surface and achieving uniform gas supply.
Solution Approach 2:
Different holes in the injectors are designed with different orientations (e.g., 45-degree angles, 90-degree angles) and positions to deliver gas to specific local regions of the substrate. This local customization of gas delivery characteristics ensures that each area of the substrate receives appropriate gas flow for uniform processing.
2Productivity
If traditional exhaust systems are used, then the equipment structure is simple, but the removal of reaction by-products is inefficient
Solution Approach 1:
The exhaust system employs multiple exhaust manifolds with holes distributed at various positions and angles, segmenting the exhaust function across different zones. This allows simultaneous evacuation of reaction by-products from multiple locations, improving overall exhaust efficiency and enabling higher throughput.
Solution Approach 2:
The exhaust manifolds incorporate holes with asymmetric angular distributions (e.g., 45-degree angles, 90-degree angles) optimized for specific exhaust directions. This asymmetric design enhances the removal efficiency of reaction by-products by directing exhaust flows to effectively clear different regions of the processing chamber.
3Productivity
If large batch processing is implemented, then the production volume increases, but the uniformity of gas exposure across substrates decreases
Solution Approach 1:
Multiple injectors are strategically positioned to cover large substrate batches, with each injector responsible for specific zones. This segmentation maintains uniform gas exposure across all substrates in the batch by ensuring adequate gas distribution to each region, even at high processing volumes.
Solution Approach 2:
The injector holes are oriented at various angles (45 degrees, 90 degrees) to deliver gas from multiple spatial dimensions. This multi-dimensional gas delivery approach ensures uniform coverage across large substrate batches by addressing gaps that would exist with single-direction gas flow.
4Area of stationary object
If equipment footprint is reduced, then the manufacturing space efficiency improves, but the gas distribution uniformity deteriorates
Solution Approach 1:
By orienting injector holes at various angles (45 degrees, 90 degrees) rather than relying solely on horizontal positioning, the system achieves effective gas distribution across the substrate in a compact vertical and angular configuration. This dimensional approach to gas delivery maintains uniformity while reducing the horizontal footprint of the equipment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances uniformity and efficiency of gas interaction with substrates, improving manufacturing throughput and reducing costs, thereby making PV solar energy systems more competitive with traditional energy generation methods.
Implementation Method 1
The holes are arranged with a range of angles relative to the centerline of the substrates so that the substrates are uniformly exposed to the gas from the injectors
Implementation Method 2
The holes are arranged with a range of angles relative to the centerline of the substrates so that the substrates are uniformly exposed to the gas from the delivery gas injectors as the reaction by-products are removed from the enclosure
Implementation Method 3
The substrates may be heated and the gases may be used to dope the substrates to change their electrical or chemical properties, deposit materials on the substrates, remove materials from the substrates, or change the surface properties of the substrates
Data Source
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AI summary
The present invention relates to equipment used to manufacture PV cells or modules. In some embodiments, a gas delivery and gas exhaust system are provided for processing a plurality of substrates. The gas delivery and gas exhaust system are designed such that the substrates are exposed in a uniform manner to the gas.