Thin-Film Solar Cell Module Laser Scribing with Metal Nitride Sacrificial Layer
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Solution Overview
Problem
Existing thin-film solar cell module manufacturing techniques face challenges in achieving high power conversion efficiency and productivity due to issues with laser scribing processes, such as damage to rear electrodes, increased series resistance, and difficulties in achieving small line widths, which affect the transparency and aesthetic applications of solar cells in building-integrated photovoltaics.
Innovation Solution
A thin-film solar cell module structure and manufacturing method involving a transparent substrate, a first rear electrode with a metal nitride layer, and a light absorption layer, where laser scribing is performed using a transparent electrode as a sacrificial layer to minimize damage and enhance precision, allowing for improved patterning and reduced manufacturing costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If conventional laser scribing is used to pattern the light absorption layer, then transparency is achieved, but the rear electrode is damaged and series resistance increases
Solution Approach 1:
A metal nitride layer is deposited on the rear electrode before laser scribing to serve as a protective sacrificial layer. This preliminary action prevents direct laser damage to the rear electrode while enabling effective scribing of the light absorption layer, thus maintaining both transparency and rear electrode integrity
Solution Approach 2:
The metal nitride layer acts as an intermediary between the laser beam and the rear electrode. It absorbs the laser energy and undergoes phase change, mediating the scribing process while protecting the underlying rear electrode from direct thermal damage, thereby reducing series resistance and maintaining electrode integrity
2Ease of manufacture
If mechanical scribing is used to pattern the light absorption layer, then equipment cost is reduced, but productivity decreases due to frequent tip replacement
Solution Approach 1:
The invention replaces mechanical scribing with laser scribing assisted by a metal nitride sacrificial layer. This substitution eliminates mechanical wear and tip replacement issues, significantly improving productivity while maintaining ease of manufacture through standard laser equipment
Solution Approach 2:
The invention changes the physical state and properties of the rear electrode surface by depositing a metal nitride layer with specific optical and thermal properties. This parameter change enables laser scribing to proceed without mechanical contact, eliminating productivity losses from mechanical wear
3Illumination intensity
If laser scribing is used to achieve small line widths, then transparency and aesthetics are improved, but manufacturing precision becomes difficult to control
Solution Approach 1:
The metal nitride layer changes the optical absorption and thermal conductivity parameters at the scribing interface, enabling precise control of laser energy distribution. This allows achievement of small, well-defined line widths with improved manufacturing precision while maintaining transparency
Solution Approach 2:
The metal nitride layer undergoes rapid thermal expansion and phase change during laser irradiation, creating a controlled ablation front that defines precise scribing line widths. This thermal mechanism enables accurate line width control for aesthetic transparent applications
4Productivity
If a transparent rear electrode is used to enable substrate-incident laser processing, then productivity improves, but series resistance increases
Solution Approach 1:
The invention creates a composite rear electrode structure combining a transparent conductive oxide layer with a metal nitride sacrificial layer. This composite structure maintains electrical conductivity for low series resistance while enabling substrate-incident laser processing for improved productivity
Solution Approach 2:
The metal nitride layer is preliminarily deposited to serve as a sacrificial element that enables laser processing without requiring the entire rear electrode to be transparent. This preliminary action allows use of standard opaque electrodes, maintaining conductivity while achieving productivity benefits through laser-assisted scribing
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances power conversion efficiency, productivity, and functionality by reducing series resistance, minimizing damage to rear electrodes, and enabling smaller line widths, thus improving the performance and cost-effectiveness of thin-film solar cell modules, particularly for transparent and aesthetically integrated applications.
Implementation Method 1
irradiating a laser to be incident onto a second surface opposite to the first surface of the transparent substrate to remove at least a portion of a second stack structure including the second rear electrode and the light absorption layer
Implementation Method 2
The metal nitride layer may include a metal nitride represented by Formula 1: Mx(CyN1-y)1-x wherein, in Formula 1, 0.4≤x≤0.9, 0≤y≤0.1
Implementation Method 3
using a transparent electrode as a sacrificial layer to minimize damage and enhance precision
Implementation Method 4
a light absorption layer stacked on the second rear electrode and including metal chalcogenide
Data Source
AI summary
Provided are a thin-film solar cell module structure and a method of manufacturing the same.


