Solar Cell Transport Layers via Oxygen Plasma Ion Plating

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Solution Overview

Problem

Existing solar cell manufacturing methods face challenges in achieving optimal performance and productivity due to issues with the electron and hole transport layers, such as high resistance and pinhole generation, which affect current extraction and defect rates.

Innovation Solution

The formation of transport layers using a metal oxide layer by an ion plating method with oxygen-containing plasma, which stabilizes plasma generation and reduces pinhole formation, allowing for improved band adjustment and reduced resistance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional methods are used to form transport layers, then manufacturing process is simpler, but resistance is high and pinholes are generated

Engineering Contradiction:
Improvetransport layer qualityVSAvoidmanufacturing process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent applies parameter changes by utilizing plasma state and ion plating conditions to form the metal oxide layer. By controlling plasma parameters (oxygen concentration, power, pressure) and ion plating parameters (ion energy, deposition rate), the transport layer achieves optimal properties with reduced resistance and minimized pinholes, resolving the contradiction between layer quality and process complexity

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite materials by forming a metal oxide layer (such as ZnO, TiO2, or In2O3) within the transport layer structure. This metal oxide component enhances electron transport capability and reduces resistance while maintaining layer integrity, thereby improving transport layer quality without requiring overly complex manufacturing processes

Inventive Principle:
Principle #40Composite materials

2Reliability

If transport layer thickness is increased to reduce resistance, then resistance decreases, but pinhole generation increases

Engineering Contradiction:
Improvecurrent extraction efficiencyVSAvoiddefect rate
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent utilizes parameter changes in the ion plating process to achieve dense, uniform metal oxide layer formation at controlled thicknesses. By optimizing ion energy, plasma density, and deposition rate, the process produces pinhole-free transport layers with adequate thickness to ensure low resistance and high current extraction efficiency

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs oxygen-containing plasma as a strong oxidizing environment during ion plating to form stoichiometric metal oxide layers. This accelerated oxidation ensures complete oxide formation without pinholes, allowing the transport layer to achieve both low resistance (through adequate thickness) and high reliability (through defect-free structure)

Inventive Principle:
Principle #38Strong oxidants (Accelerated oxidation)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the performance and productivity of solar cells by minimizing defects and optimizing the transport of electrons and holes, thereby improving overall efficiency.

Implementation Method 1

a metal oxide layer is formed by an ion plating method using plasma containing oxygen

Methodology Applied
Scientific EffectIon plating:

Implementation Method 2

plasma containing oxygen

Methodology Applied
Scientific EffectPlasma: Plasma

Data Source

PatentUS20250311520A1Manufacturing method for solar cell, manufacturing apparatus for solar cell, part for manufacture of solar cell, and solar cell
Publication Date: 2025.10.02 SUMITOMO HEAVY IND LTD
  • US20250311520A1 patent drawing
  • US20250311520A1 patent drawing
  • US20250311520A1 patent drawing

AI summary

A manufacturing method for a solar cell, which includes a photoelectric conversion layer absorbing light and converting the light into electrical energy, an electrode extracting the electrical energy generated in the photoelectric conversion layer, and a transport layer transporting electrons or holes from the photoelectric conversion layer, includes a transport layer forming step of forming the transport layer, in which in the transport layer forming step, a metal oxide layer is formed by an ion plating method using plasma containing oxygen.