Solar Cell Substrate Agitation via Periodic Gas Bubble Supply
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Solution Overview
Problem
In the manufacturing of solar cells with semiconductor substrates, ensuring uniform contact with chemical solutions during etching and cleaning steps is crucial to prevent incomplete processing, which can lead to production failures and yield decreases.
Innovation Solution
A method involving the immersion of substrates in a chemical solution with controlled gas bubble agitation, creating alternating states of bubble supply to facilitate uniform contact and prevent substrate sticking, thereby ensuring thorough processing and reducing the likelihood of incomplete etching or cleaning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If substrates are immersed in chemical solution for etching or cleaning, then processing is performed, but uniform contact between substrate and chemical solution is difficult to achieve
Solution Approach 1:
The patent applies periodic action by alternately supplying gas bubbles to different regions (first side and second side) of the substrate in a periodic manner. This periodic gas supply creates alternating agitation states that ensure the chemical solution uniformly contacts the entire substrate surface during immersion, resolving the contradiction between achieving uniform processing and ease of operation.
2Manufacturing precision
If gas bubbles are supplied to agitate chemical solution, then substrate contact uniformity is improved, but substrate may stick to other substrates or cassette
Solution Approach 1:
The patent uses periodic action by alternately supplying gas bubbles to different sides of the substrate. This periodic agitation prevents the chemical solution from becoming stagnant, thereby preventing substrate sticking to other substrates or the cassette while maintaining uniform processing contact.
Solution Approach 2:
The patent applies pneumatics by using gas bubbles to agitate the chemical solution. The gas supply system creates fluid motion in the chemical solution that prevents substrate adhesion while ensuring uniform chemical contact, resolving the contradiction between processing uniformity and preventing harmful sticking effects.
3Productivity
If entire substrate contact with chemical solution is ensured, then production yield is improved, but processing complexity increases
Solution Approach 1:
The patent implements periodic action through alternating gas supply to different substrate regions. This relatively simple periodic control mechanism ensures complete substrate contact with the chemical solution, improving production yield without requiring complex processing systems.
Solution Approach 2:
The patent applies self-service by using the gas bubbles themselves to create the agitation needed for uniform contact. The gas supply system leverages the natural buoyancy and motion of bubbles to achieve thorough substrate processing, improving yield without adding significant system complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the uniformity of substrate processing, reduces the occurrence of incomplete etching or cleaning, and improves the production yield of solar cells by preventing substrate contact with other substrates or the cassette, resulting in a more efficient formation of texture structures and improved light incidence efficiency.
Implementation Method 1
agitating the chemical solution by supplying gas bubbles or a liquid into the chemical solution
Implementation Method 2
supplying gas bubbles or a liquid into the chemical solution
Data Source
AI summary
In a processing of immersing substrates in a chemical solution, and agitating the chemical solution by as bubbles or liquid, the gas bubbles or liquid is supplied so as to bring about alternate occurrence of a first state and a second state. The first state is a state in which an amount of the gas bubbles or the liquid supplied to first side in one direction of each substrate is greater than an amount of the gas bubbles or the liquid supplied to a second side in the one direction of the substrate. The second state is a state in which the amount of the gas bubbles or the liquid supplied to the first side in the one direction of the substrate is smaller than the amount of the gas bubbles or the liquid supplied to the second side in the one direction of the substrate.