Solar Cell Substrate Loading Configuration for Vertical Furnace Throughput
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Solution Overview
Problem
Vertical furnaces used for processing solar cell substrates have limited throughput due to the need for minimal space between substrates, restricting the number of substrates that can be processed in a single batch.
Innovation Solution
A method is developed to configure vertical furnaces with multiple arrays of solar cell substrates, each array comprising multiple substrates vertically oriented and horizontally spaced, allowing for increased substrate capacity within the furnace's process chamber, enabling more efficient use of space and automation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple arrays of solar cell substrates are accommodated in the process chamber, then the number of substrates processed in a single batch is increased, but the space requirements and loading complexity increase
Solution Approach 1:
The loading configuration is segmented into multiple arrays, with each array containing a plurality of solar cell substrates arranged in specific patterns. This segmentation allows the furnace to process multiple substrates simultaneously while maintaining organized, manageable groups that can be loaded and processed efficiently
Solution Approach 2:
The patent transitions from processing substrates in a single array to multiple arrays arranged in different spatial dimensions within the process chamber. By utilizing vertical and horizontal spacing to create multiple arrays, the system increases throughput by processing substrates across multiple dimensions simultaneously
2Volume of stationary object
If minimal space is maintained between substrates, then the furnace size is reduced, but the number of substrates that can be processed in a single batch is limited
Solution Approach 1:
By segmenting substrates into multiple arrays with controlled spacing, the system maximizes the use of available furnace volume. Each array maintains minimal necessary spacing between substrates while multiple arrays utilize the remaining space, thereby increasing total capacity without requiring a larger furnace
Solution Approach 2:
The process chamber is designed to accommodate multiple arrays of substrates simultaneously, making the furnace capable of processing a larger number of substrates in a single batch. This multi-functional loading configuration allows the same furnace volume to handle increased throughput through optimized spatial arrangement
Data Source
AI summary
A method for processing solar cells comprising:providing a vertical furnace to receive an array of mutually spaced circular semiconductor wafers for integrated circuit processing;composing a process chamber loading configuration for solar cell substrates, wherein a size of the solar cell substrates that extends along a first surface to be processed is smaller than a corresponding size of the circular semiconductor wafers, such that multiple arrays of mutually spaced solar cell substrates can be accommodated in the process chamber,loading the solar cell substrates into the process chamber;subjecting the solar cell substrates to a process in the process chamber.