Semiconductor Solder Bump Composition Control via Layered Deposition

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Solution Overview

Problem

Conventional solder bump plating processes face challenges in composition control, particularly with tin-copper solder, where variations in copper content can lead to unexpectedly high melting temperatures, exceeding the thermal limits of circuit board and semiconductor chip components, potentially preventing solder liquification.

Innovation Solution

A method involving the deposition of layers of metallic materials with specific desired volumes of tin and copper, followed by reflow to form solder structures with precise composition ratios, avoiding bulk plating of pre-combined solder constituents and ensuring controlled copper content.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional bulk plating of pre-mixed solder solution is used, then the plating process is simple, but the solder composition cannot be precisely controlled leading to unpredictable melting temperatures

Engineering Contradiction:
Improvesolder composition controlVSAvoidplating process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The solder bump fabrication process is segmented into distinct deposition steps: first depositing a copper layer to a first thickness, then depositing a tin layer to a second thickness. This segmentation allows independent control of each metal layer's thickness, enabling precise control of the final solder composition and melting temperature.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The copper layer is deposited first as a preliminary action before the tin layer. By establishing the copper base layer first and then controlling the tin deposition thickness, the process pre-determines the solder composition parameters before the actual soldering operation, ensuring predictable melting characteristics.

Inventive Principle:
Principle #10Preliminary action

2Reliability

If copper content in tin-copper solder varies, then the solder can still conduct current, but the melting temperature may significantly exceed desired reflow temperatures

Engineering Contradiction:
Improvecurrent conductionVSAvoidmelting temperature
Core Design Contradiction:
ReliabilityVSTemperature

Solution Approach 1:

The process incorporates feedback control through precise thickness measurements of deposited layers. By monitoring and controlling the copper layer thickness (first thickness) and tin layer thickness (second thickness), the system feedback-adjusts the deposition parameters to maintain the desired solder composition within tight tolerances, ensuring melting temperature remains within the safe reflow range.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The invention changes the critical parameter of solder composition by independently controlling the thickness parameters of copper and tin layers. By adjusting the first thickness (copper) and second thickness (tin) parameters during deposition, the process optimizes the solder's melting temperature to match the reflow profile requirements while maintaining electrical conductivity.

Inventive Principle:
Principle #35Parameter changes

3Strength

If high copper content solder is used, then the solder joint strength may improve, but the melting temperature increases beyond circuit board tolerance

Engineering Contradiction:
Improvesolder joint strengthVSAvoidthermal damage to components
Core Design Contradiction:
StrengthVSObject-affected harmful factors

Solution Approach 1:

The invention applies local quality control by optimizing the copper distribution specifically at the interface region through controlled copper layer deposition. The copper layer is deposited to a specific first thickness to provide adequate interfacial bonding and joint strength, while the tin layer deposited to a second thickness controls the overall melting temperature, creating a composition gradient that satisfies both strength and thermal safety requirements locally.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for the formation of solder bumps with a desired composition, preventing overheating and ensuring reliable solder liquification, thus maintaining the integrity of temperature-sensitive components.

Implementation Method 1

The first and second layers are reflowed to form a solder structure with a desired ratio of the first metallic material to the second metallic material

Methodology Applied
Scientific EffectReflow: Heating

Implementation Method 2

a solder bump is metallurgically bonded to a given I/O site or pad of the semiconductor chip and a so-called pre-solder is metallurgically bonded to a corresponding I/O site of the circuit board

Methodology Applied
Scientific EffectMetallurgical bonding: Welding

Data Source

PatentUS9318457B2Methods of fabricating semiconductor chip solder structures
Publication Date: 2016.04.19 ADVANCED MICRO DEVICES INC
  • US9318457B2 patent drawing
  • US9318457B2 patent drawing
  • US9318457B2 patent drawing

AI summary

Various semiconductor chip solder bump and underbump metallization (UBM) structures and methods of making the same are disclosed. In one aspect, a method is provided that includes depositing a layer of a first metallic material on a semiconductor chip. The first layer has a first physical quantity. A layer of a second metallic material is deposited on the layer of the first metallic material. The second layer has a second physical quantity. The first and second layers are reflowed to form a solder structure with a desired ratio of the first metallic material to the second metallic material.