Solder Joint Die Attachment for IC Package Thermal Resistance

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Solution Overview

Problem

The semiconductor industry faces challenges in reducing die alignment issues, thermal resistance, and manufacturing costs in packaging integrated circuit dies, particularly in forming stacked semiconductor devices like 3DICs, where traditional methods are inefficient and costly.

Innovation Solution

The proposed solution involves a die attachment method that reduces overlay shifts and thermal resistance by using solder joints instead of adhesive films, and modifies seed layers for redistribution layers to reduce contact resistance, allowing for the formation of integrated circuit packages with through-molding vias directly on the underlying redistribution layer, thereby simplifying the manufacturing process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If adhesive films are used to attach dies to carriers, then the packaging process is simplified, but thermal resistance increases and die alignment precision deteriorates

Engineering Contradiction:
Improvepackaging process simplicityVSAvoidthermal resistance
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent replaces the mechanical/adhesive bonding system with a solder-based electrical and mechanical bonding system. Solder joints provide both mechanical attachment and thermal conduction pathways, eliminating the thermal barrier introduced by adhesive films while maintaining ease of manufacture through standardized soldering processes.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the bonding material from organic adhesive to metallic solder, fundamentally altering the thermal and electrical properties of the joint. This parameter change reduces thermal resistance by several orders of magnitude while maintaining acceptable manufacturing complexity through controlled solder reflow processes.

Inventive Principle:
Principle #35Parameter changes

2Ease of manufacture

If traditional die attachment methods are used, then manufacturing costs are reduced, but die alignment precision and overlay accuracy worsen

Engineering Contradiction:
Improvemanufacturing costVSAvoiddie alignment precision
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent applies solder paste to the carrier substrate before die attachment, creating pre-formed solder joints that guide die placement. This preliminary action establishes precise alignment references that improve overlay accuracy while maintaining cost-effectiveness through a single-step reflow process.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent replaces mechanical alignment methods with a solder-based self-alignment system where solder paste patterns and reflow physics provide inherent alignment tolerance compensation, achieving high precision without complex mechanical alignment equipment.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Device complexity

If adhesive films are used for die attachment, then the packaging process is simpler, but contact resistance increases

Engineering Contradiction:
Improvepackaging process complexityVSAvoidcontact resistance
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent replaces adhesive-based mechanical bonding with solder-based metallurgical bonding, creating direct metal-to-metal contact between die pads and carrier bond pads. This substitution eliminates the insulating adhesive layer and reduces contact resistance through intimate metallic contact and intermetallic compound formation.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent employs composite solder joint structures with multiple metallurgical layers including base metal, intermetallic compounds, and solder matrix, creating a composite material system that provides both low contact resistance and mechanical strength while maintaining process simplicity.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces thermal resistance, minimizes die alignment issues, and decreases manufacturing costs by simplifying the packaging process, while maintaining electrical connectivity and alignment through the use of solder joints and optimized seed layers.

Implementation Method 1

attaching the backside surface of the integrated circuit die to the bond pad using a solder joint

Methodology Applied
Scientific EffectSoldering: Soldering

Implementation Method 2

reflowing the solder paste to form the solder joint

Methodology Applied
Scientific EffectMelting: Melting

Data Source

PatentUS11410918B2Method of making an integrated circuit package including an integrated circuit die soldered to a bond pad of a carrier
Publication Date: 2022.08.09 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11410918B2 patent drawing
  • US11410918B2 patent drawing
  • US11410918B2 patent drawing

AI summary

An integrated circuit package and a method of forming the same are provided. A method includes forming a first redistribution layer over a carrier, the first redistribution layer including a contact pad and a bond pad. A conductive pillar is formed over the contact pad. A backside surface of an integrated circuit die is attached to the bond pad using a solder joint. An encapsulant is formed along a sidewall of the conductive pillar and a sidewall of the integrated circuit die, a front-side surface of the integrated circuit die being substantially level with a topmost surface of the encapsulant and a topmost surface of the conductive pillar. A second redistribution layer is formed over the front-side surface of the integrated circuit die, the topmost surface of the encapsulant and the topmost surface of the conductive pillar.