Side-Mounted Solenoid Valve Attachment for Compact Actuators
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Solution Overview
Problem
Existing attachment structures for solenoid valves in semiconductor manufacturing, particularly in ALD processes, face issues with compactness, maintainability, and flexibility due to increased overall height and complex fixing structures, which hinder usability and maintainability, especially when integrating with actuators.
Innovation Solution
A side-surface attachment structure for solenoid valves featuring a removable attachment member with a fixing part and a washer for reduced heat transfer, allowing for easy installation and removal without disassembling the actuator, maintaining compactness and enhancing maintainability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the solenoid valve is fixed to the upper surface of the actuator, then the integration and compactability are improved, but the overall height is greatly increased and the flexibility in attachment position is reduced
Solution Approach 1:
The patent transitions from vertical attachment (upper surface) to side-surface attachment, changing the spatial dimension of solenoid valve integration. This allows the solenoid valve to be positioned laterally rather than vertically, reducing overall height while maintaining compact integration through the attachment member extending from the side surface of the actuator body
2Volume of moving object
If the solenoid valve is fixed to the upper surface of the actuator, then the integration is improved, but the flexibility in attachment position, direction and orientation is reduced
Solution Approach 1:
The patent introduces a rotatable attachment member that can be rotated about the side surface of the actuator body, making the attachment dynamic rather than fixed. This allows the solenoid valve to be positioned at different orientations and directions while maintaining integrated structure, significantly improving flexibility in attachment configuration
Solution Approach 2:
The attachment member serves multiple functions: it provides structural support, enables rotatable positioning, and facilitates the connection between the solenoid valve and actuator. This multi-functional design allows the same attachment structure to accommodate various attachment positions and orientations without requiring different components
3Ease of operation
If a long air ductwork is used to link the actuator and solenoid valve, then the separate configuration is simplified, but the responsivity is degraded due to time loss in the ductwork
Solution Approach 1:
The patent merges the solenoid valve and actuator into a closely integrated structure through the attachment member, eliminating the need for long air ductwork. The air passage is directly formed within the attachment member, creating a short and efficient air supply path that maintains ease of separate configuration while dramatically improving responsivity by removing time delays associated with long ductwork
4Strength
If the solenoid valve is attached via complex fixing structure, then the attachment strength is improved, but the maintainability and ease of installation are reduced
Solution Approach 1:
The patent segments the attachment structure into a separate, removable attachment member that can be independently installed and removed. This segmentation allows the solenoid valve to be easily attached and detached without disassembling the entire actuator, significantly improving maintainability while the attachment member itself provides sufficient attachment strength through its structural design
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides high maintainability, compactness, and flexibility in attaching solenoid valves to actuators, reducing heat transfer and ensuring durability, while allowing for easy handling and adjustment, thus improving the responsivity and durability of ALD valves.
Implementation Method 1
a solenoid valve for switching a compressed air flow path with excitation of the solenoid by electrification
Implementation Method 2
a direct diaphragm valve including a pneumatic actuator... air pressure operation by the actuator
Data Source
AI summary
An attachment structure for an actuator-specific solenoid valve and an actuator-quipped valve. The attachment structure can be easily applied to or released from any actuator and a solenoid valve, and the solenoid valve can be easily attached to and removed from any position in a side-surface circumferential direction without impairing compactability of the actuator. The attachment structure for an actuator-specific solenoid valve includes a base body provided on a lower part of a cylindrical actuator and an attachment member removably attachable externally from a main body of the actuator, the attachment member having a fixing part formed as being extended at a position close to a side surface of the main body of the actuator and a solenoid valve for fluid control attached to the fixing part, and the attachment member fixing the solenoid valve being provided rotatably about a side surface of the main body of the actuator.