Solid Electrolyte Membrane Film Formation Defect Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing film formation methods, such as those using solid electrolyte membranes, often result in defects like voids and pinholes due to gas by-products trapped in the metal film during formation.
Innovation Solution
A method involving a solid electrolyte membrane that alternates between contact and non-contact states with the substrate during film formation to deaerate gas by-products and resume deposition in a different contact state, ensuring uniform film thickness and minimizing defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the solid electrolyte membrane is brought into contact with the substrate during film formation, then the metal film can be formed continuously, but gas by-products become trapped in the metal film causing defects like voids and pinholes
Solution Approach 1:
The patent applies periodic action by alternating between contact state (for continuous film formation) and non-contact state (for gas release) during the electrochemical deposition process. The solid electrolyte membrane is periodically separated from the substrate to allow trapped gas by-products to escape, then brought back into contact to resume film formation, thereby preventing voids and pinholes while maintaining productivity
Solution Approach 2:
The patent implements dynamics by making the relative position between the solid electrolyte membrane and substrate variable rather than fixed. The system dynamically transitions between contact and non-contact states, allowing the membrane to move closer to or farther from the substrate as needed to either continue deposition or release trapped gas, thus resolving the contradiction between continuous formation and defect prevention
2Productivity
If the solid electrolyte membrane is kept in contact with the substrate, then film formation efficiency is high, but gas by-products accumulate and create defects
Solution Approach 1:
The patent converts the harmful effect of gas by-products into a beneficial process feature. By intentionally introducing non-contact periods, the trapped gas that would otherwise cause defects is utilized as a signal to pause deposition, allowing gas release that ultimately improves film quality while maintaining high overall formation efficiency through rapid resumption of contact state
3Reliability
If the solid electrolyte membrane is separated from the substrate during film formation, then gas by-products can be released, but film formation continuity is interrupted
Solution Approach 1:
The patent uses periodic action to balance film quality and continuity by implementing short, controlled separation cycles during deposition. The membrane is separated briefly to release gas by-products, then quickly returned to contact state to resume film formation, maintaining overall continuity while periodically eliminating defects
Solution Approach 2:
The system dynamically adjusts the contact state between membrane and substrate based on real-time needs. The relative position is made variable, allowing rapid transitions between contact (for continuity) and non-contact (for gas release), thereby maintaining both film quality and formation continuity through adaptive control
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively suppresses the formation of defects like pinholes and voids, allowing for the creation of a uniform metal film with controlled thickness and improved surface quality.
Implementation Method 1
Metal ions to be coated are impregnated in the solid electrolyte membrane. The substrate is arranged opposite the anode so as to be electrically conductive with the cathode. The metal ions impregnated inside the solid electrolyte membrane are precipitated at a cathode side by applying voltage between the anode and the cathode.
Implementation Method 2
a film is formed while bringing the solid electrolyte membrane into contact with the substrate without any gap, so gas (hydrogen gas) is produced as a by-product between the solid electrolyte membrane and the substrate (metal film)
Data Source
Figure 1
Figure 2
Figure 3A~3D
AI summary
A solid electrolyte membrane (13) is arranged on a surface of an anode (11) between the anode (11) and a substrate (B) that serves as a cathode. The solid electrolyte membrane (13) is brought into contact with the substrate (B). At the same time, a metal film (F) is formed on the surface of the substrate (B) by causing metal to precipitate onto the surface of the substrate (B) from metal ions through application of voltage between the anode (11) and the substrate (B) in a first contact state where the solid electrolyte membrane (13) contacts the substrate (B). The metal ions are contained inside the solid electrolyte membrane (13).