Solid Electrolyte Membrane for Precise Metal Film Deposition
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Solution Overview
Problem
Conventional metal film forming methods using a solid electrolyte membrane often result in metal film deposition outside the desired region due to the application of voltage across the entire substrate, leading to unintended metal film formation.
Innovation Solution
A film forming method and apparatus that utilize a solid electrolyte membrane with a first ion-permeable portion and a second electrically insulating portion with lower ion permeability, embedded in the first portion, to attract and collect metallic ions at a predetermined position on the substrate, allowing precise control over metal film deposition within a desired range.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If voltage is applied between the anode and the substrate via a solid electrolyte membrane, then metallic ions move through the membrane, but metal film is formed outside the desired region on the substrate
Solution Approach 1:
The solid electrolyte membrane is designed with different portions having different properties: a first portion made of ion-permeable material and a second portion made of electrically insulating material with lower ion permeability. This local differentiation allows the membrane to selectively guide metallic ion transport to a specific region on the substrate, preventing unwanted deposition elsewhere. The second portion acts as an ion barrier that confines metal film formation to the desired area.
2Productivity
If the solid electrolyte membrane is made entirely of ion-permeable material, then metallic ions can pass through easily, but metal film forms across the entire substrate surface
Solution Approach 1:
The solid electrolyte membrane is segmented into two distinct portions: a first portion that is ion-permeable and allows metallic ion transport, and a second portion that is electrically insulating and has lower ion permeability. This segmentation enables the membrane to simultaneously achieve adequate ion transport efficiency in the first portion while providing precise position control by blocking ions in the second portion, which is positioned to define the boundary of the desired metal film region.
3Reliability
If the solid electrolyte membrane is pressed to the substrate, then contact is improved for ion transport, but voltage distribution becomes non-uniform causing unintended deposition
Solution Approach 1:
The membrane's local quality differentiation means the first portion (ion-permeable) maintains good contact with the substrate for reliable ion transport, while the second portion (electrically insulating) acts as a barrier even under pressure. This ensures that voltage and ion flux are concentrated in the desired region, preventing non-uniform deposition patterns that would otherwise occur with uniform membrane composition.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the formation of a metal film within a specific range on the substrate by attracting metallic ions to the second portion, preventing deposition on the first portion, thus achieving precise control and patterned film formation.
Implementation Method 1
a first portion made of an ion permeable material that the metallic ions permeate
Implementation Method 2
a second portion made of a material having an electric insulating property... when the voltage is applied, the metallic ions having passed through the first portion come closer to the polarized second portion, the metallic ions are attracted toward the second portion
Implementation Method 3
applying voltage between the anode and the substrate... so as to form a metal film deriving from the metallic ions on a surface of the substrate
Data Source
AI summary
A solid electrolyte membrane is disposed between an anode and a substrate, and voltage is applied between the anode and the substrate while the solid electrolyte membrane is pressed onto the substrate so as to form a metal film on the substrate. In this film forming method, there is used the solid electrolyte membrane that includes: a first portion made of an ion permeable material; and a second portion made of a material having an electric insulating property and having a low permeability of metallic ions, the second portion being embedded in the first portion so as to be exposed from a surface of the solid electrolyte membrane, the surface of the solid electrolyte membrane facing the substrate.