Solid Immersion Lens Holder Optical Axis Design
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Solution Overview
Problem
The existing solid immersion lens holders with tapered shapes often cause interference with the side walls of recesses, preventing observation of the peripheral regions of ICs or semiconductor devices buried in molds, as the lens holder's outer surface contacts the recess walls, obstructing the view.
Innovation Solution
A solid immersion lens holder design featuring a base part with a light passing portion and a lens holding part extending along the optical axis, allowing light from the solid immersion lens to pass through the holder and into the objective lens while preventing contact with the recess walls, enabling observation of the peripheral regions by maintaining the lens's position without interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the solid immersion lens holder is designed with a tapered shape, then the lens holder can securely hold the solid immersion lens and maintain optical coupling, but the outer peripheral surface of the lens holder contacts the side wall of the recess, preventing observation of the peripheral region of the IC
Solution Approach 1:
The lens holder is divided into two functional parts: an observation region where light can pass through to observe the IC, and a support region where the holder structure provides mechanical support and maintains optical coupling. This segmentation allows the holder to simultaneously achieve reliable optical coupling and extended observation range by allowing light to pass through the observation region while the support region maintains structural integrity
Solution Approach 2:
The lens holder acts as an intermediary structure that bridges the solid immersion lens and the observation region. By designing the holder with a specific configuration that includes an observation region, it mediates between the need for secure lens mounting and the need to avoid blocking light paths to the peripheral regions of the IC
2Adaptability or versatility
If the lens holder extends toward the peripheral part of the IC to enable observation, then the observation range is improved, but the holder structure may interfere with the recess geometry and prevent proper positioning
Solution Approach 1:
The holder is segmented into an observation region that extends toward the IC periphery and a support region that maintains precise positioning. This segmentation allows the observation region to reach extended areas while the support region maintains manufacturing precision and proper positioning within the recess
3Reliability
If the holder structure is made robust to maintain lens positioning, then optical coupling is improved, but the holder blocks light paths to the peripheral regions of the observation object
Solution Approach 1:
The holder structure is segmented into regions with different optical properties: support regions that are opaque and provide mechanical strength for lens positioning, and observation regions that are transparent or have openings to allow light transmission. This segmentation enables the holder to simultaneously maintain robust lens positioning and permit light paths to peripheral regions
Solution Approach 2:
Different parts of the holder have different optical qualities: the support region has high opacity to block light and provide structural integrity, while the observation region has high transparency to allow light transmission. This local differentiation of properties allows the holder to simultaneously achieve robust positioning and maintain light transmission to peripheral areas
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design allows for the observation of regions closer to the peripheral parts of the observation object, even when the object is in a recess, by securely guiding light from the solid immersion lens to the objective lens without contact with the recess walls, thus enhancing the observational capabilities.
Implementation Method 1
the base part has a light passing portion which transmits the light emerging from the solid immersion lens to the base part side, toward the objective lens
Data Source
AI summary
A solid immersion lens holder 8A is provided with a base part 50 attached to an objective lens 21, and a lens holding part 60 provided with the base part 50, extending in a direction of optical axis L of the objective lens 21, and arranged to hold a solid immersion lens 6 at an end portion thereof. The lens holding part holds the solid immersion lens so that light emerging from the solid immersion lens to the base part side travels through a region outside the lens holding part and toward the base part, and the base part has a light passing portion 53 which transmits the light toward the objective lens. Since the lens holding part extends in the direction of the optical axis L of the objective lens, even in a case where an observation object 11 is observed as located on a bottom surface of recess 13, the lens holding part will be prevented from contacting a side wall 13a of the recess. As a result, it becomes feasible to observe the observation object up to a region closer to the vicinity of peripheral part 11a of the observation object. This provides a solid immersion lens holder allowing observation up to a region closer to a peripheral part of an observation object even in a case where the observation object is set in a recess of a sample.