Solid Immersion Lens Magnetic Spherical Support

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Solution Overview

Problem

Existing solid immersion lens systems face challenges in smoothly bringing the contact surface into close contact with the inspection object due to resistance from elastic members or air bearings, limiting high-resolution observation of internal semiconductor structures.

Innovation Solution

A solid immersion lens unit with a magnetically held spherical body allows the solid immersion lens to swing smoothly by rotating while maintaining point contact with the spherical body, facilitated by a holder with a non-magnetic material and a support mechanism to alleviate pressure and prevent instability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If an elastic member or air bearing is used to hold the solid immersion lens, then the lens can be positioned to contact the inspection object, but the elastic force or air pressure creates resistance that prevents smooth swinging and close contact

Engineering Contradiction:

Improvesmooth swinging of solid immersion lensVSAvoidresistance from elastic member or air bearing

Core Design Contradiction:

Ease of operationVSForce

Solution Approach 1:

The patent replaces the mechanical support system (elastic member or air bearing) with a magnetic field-based support system. The spherical body is held by magnetic force without physical contact, eliminating the resistance that previously prevented smooth swinging of the solid immersion lens.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces a spherical body as an intermediary between the holder and the solid immersion lens. This spherical body is held by magnetic force and provides a contact point for the lens to swing smoothly without the resistance of direct mechanical support.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Measurement precision

If the solid immersion lens is brought into close contact with the inspection object, then high-resolution observation is achieved, but the contact surface may be damaged or unstable

Engineering Contradiction:

Improveobservation resolutionVSAvoidcontact stability and damage prevention

Core Design Contradiction:

Measurement precisionVSReliability

Solution Approach 1:

The patent provides beforehand cushioning by using the spherical body as a buffer between the holder and the solid immersion lens. The spherical body absorbs shocks and provides stable support, preventing damage to the contact surface while maintaining close contact for high-resolution observation.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

Solution Approach 2:

The patent replaces the unstable mechanical support system with a magnetic field-based system that holds the spherical body without physical contact. This provides stable support while allowing the solid immersion lens to maintain close contact with the inspection object for high-resolution observation.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Ease of operation

If a magnet is used to hold the spherical body, then smooth swinging is enabled, but the spherical body may move to a position where magnetic force is insufficient and fall off

Engineering Contradiction:

Improvesmooth swinging capabilityVSAvoidspherical body retention

Core Design Contradiction:

Ease of operationVSReliability

Solution Approach 1:

The patent uses a nested structure where the spherical body is held within the magnetic field generated by the magnet. The spherical body is positioned within the accommodation portion, and the magnetic field provides containment and retention, preventing the spherical body from moving to positions where magnetic force is insufficient.

Inventive Principle:

Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables easy and stable contact of the solid immersion lens with the inspection object, enhancing high-resolution observation capabilities and preventing damage or instability during contact.

Implementation Method 1

a spherical body (6) rotatably held by a magnetic force of the magnet (5)

Methodology Applied

Scientific EffectMagnetic force: Magnetism

Data Source

PatentUS11256079B2Solid immersion lens unit and semiconductor detector device

Publication Date: 2022.02.22 HAMAMATSU PHOTONICS KK

AI summary

The solid immersion lens unit includes: a solid immersion lens having a contact surface allowed to be in contact with an inspection object and a spherical surface allowed to be opposite to an objective lens; a holder holding the solid immersion lens; a magnet provided to the holder; and a spherical body rotatably held by a magnetic force of the magnet at a position opposite to the spherical surface. The holder swingably holds the solid immersion lens in a state where the spherical surface is in contact with the spherical body.