Solid Source Reactant Delivery System with Remote Bulk Fill Vessels
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Solution Overview
Problem
Current solid source reactant delivery systems for vapor deposition reactors face limitations in quickly and effectively replenishing reactants without interrupting the reactor's operation, leading to downtime and reduced throughput.
Innovation Solution
A remote solid source reactant delivery system with multiple bulk fill vessels and an interconnect line, where a line heater maintains the reactant flow at a consistent temperature, and a gas panel with valves allows seamless switching between vessels, enabling continuous operation during refilling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single bulk fill vessel is used to hold solid source reactant, then the system structure is simple, but the reactor must be shut down for refilling causing downtime and reduced productivity
Solution Approach 1:
The delivery system is segmented into multiple bulk fill vessels (first bulk fill vessel and second bulk fill vessel) that can be independently filled and operated. This allows one vessel to supply reactant while another is being refilled, eliminating reactor downtime and improving productivity without requiring complex automated switching mechanisms.
Solution Approach 2:
The second bulk fill vessel can be pre-filled with solid source reactant while the first vessel is in use. This preliminary preparation ensures that when the first vessel is depleted, the reactor can immediately switch to the pre-filled second vessel without interruption, maintaining continuous operation and high productivity.
2Productivity
If the bulk fill vessel is located close to the reactor, then the reactant delivery path is short, but the refilling operation requires reactor shutdown and reduces productivity
Solution Approach 1:
By segmenting the delivery system into multiple vessels positioned at different locations, the patent enables continuous operation. The first vessel can be located close to the reactor for efficient delivery, while the second vessel can be positioned remotely for refilling operations, allowing both proximity benefits and continuous operation to coexist.
Solution Approach 2:
The interconnect line acts as an intermediary that fluidly connects the reactor with both bulk fill vessels. This intermediary pathway allows reactant to be delivered efficiently from the first vessel while enabling the second vessel to be prepared or refilled without disrupting the delivery process, thus maintaining continuous operation.
3Productivity
If multiple bulk fill vessels are used to enable refilling during operation, then productivity is improved, but the system complexity increases
Solution Approach 1:
The system uses exactly two bulk fill vessels - the minimum number needed to enable continuous operation. This segmentation into two independent units provides the functionality of refilling during operation while keeping the overall system complexity manageable through simplicity of configuration.
Solution Approach 2:
Both bulk fill vessels are designed with the same structure and functionality, each capable of holding solid source reactant and connecting to the reactor through the interconnect line. This universality allows either vessel to serve as the active supply source, simplifying the control logic and reducing operational complexity despite having multiple vessels.
4Reliability
If the reactant delivery line is heated to maintain temperature, then reactant vaporization is improved, but energy consumption increases
Solution Approach 1:
The line heater is applied locally to the interconnect line only where necessary to maintain reactant temperature and ensure consistent vaporization. This localized heating approach maintains reliable reactant flow while minimizing energy consumption by avoiding unnecessary heating of the entire delivery system or excess portions of the line.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution reduces downtime and improves throughput by allowing refilling of reactants without interrupting the semiconductor processing, maintaining uninterrupted reactant flow and efficient vapor deposition.
Implementation Method 1
The delivery system can include a line heater that is configured to heat at least a portion of the interconnect line to at least a minimum line temperature
Implementation Method 2
The gas panel can be disposed between the interconnect line and each of the first and second bulk fill vessels. The valve can be configured to selectively flow the first vaporized chemical reactant from the first fluid outlet and the second vaporized chemical reactant from the second fluid outlet through the interconnect line
Implementation Method 3
The first bulk fill vessel can be configured to hold a first solid source chemical reactant therein. The first bulk fill vessel can include a first fluid outlet that is configured to pass a first vaporized chemical reactant out of the first vessel body
Data Source
AI summary
Herein disclosed are systems and methods related to delivery systems using solid source chemical fill vessels. The delivery system can include a vapor deposition reactor, two or more fill vessels, of which one of more can be remote from the vapor deposition reactor. Each fill vessel is configured to hold solid source chemical reactant therein. An interconnect line or conduit can fluidly connect the vapor deposition reactor with one or more of the fill vessels. A line heater can heat at least a portion of the interconnect line to at least a minimum line temperature.