Solid Source Refill System for Semiconductor Manufacturing
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Solution Overview
Problem
Conventional semiconductor manufacturing systems face downtime due to the need for cooling and replacement of solid source vessels, and increased complexity and cost from heating transport lines for remote refilling systems.
Innovation Solution
A system comprising multiple vessels and conduits to create and manage a slurry or solution of solid precursor powder and inert liquid, where the inert liquid is evaporated and the solid precursor is sublimated and recondensed to form vapor, allowing for remote operation and efficient refilling of the reaction chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single solid source vessel is located proximate to the reaction chamber, then the system can operate with simple architecture, but the vessel volume is limited and requires cooling before replacement causing system downtime
Solution Approach 1:
The system divides the solid source storage into two separate vessels: a remotely-located storage vessel and a proximate delivery vessel. This segmentation allows the storage vessel to be filled and prepared remotely while the delivery vessel maintains continuous supply to the reaction chamber, eliminating downtime associated with vessel replacement.
Solution Approach 2:
The storage vessel is prepared in advance by filling it with solid precursor material and maintaining it at appropriate temperature. This preliminary preparation allows the delivery vessel to be quickly refilled from the pre-prepared storage vessel without requiring system shutdown or cooling periods.
2Loss of time
If a remotely-located vessel is used to supply chemistry, then system downtime is reduced, but transport lines must be heated increasing cost and complexity
Solution Approach 1:
The invention extracts the solid precursor material from the slurry by evaporating the liquid carrier in the storage vessel, leaving only the solid precursor powder. This extracted solid material is then transferred to the delivery vessel, eliminating the need to heat transport lines for slurry delivery.
Solution Approach 2:
The system changes the physical state and temperature parameters of the precursor material. The solid precursor is heated to sublimation temperature in the storage vessel, then the vapor is condensed in the delivery vessel at lower temperature. This parameter transformation allows remote storage without requiring heated transport lines.
3Ease of operation
If solid precursor is stored in slurry form, then handling is simplified, but evaporation of inert liquid requires vacuum processing
Solution Approach 1:
The system utilizes phase transition of the liquid carrier from liquid to vapor through evaporation. By heating the slurry in the storage vessel, the liquid carrier evaporates and is removed by vacuum, leaving the solid precursor powder. This phase transition approach simplifies the separation process compared to mechanical filtration or centrifugation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution reduces system downtime and complexity by enabling remote operation of the solid source refill process, maintaining the solid precursor in a usable state without the need for direct heating of transport lines, thus improving operational efficiency and reducing costs.
Implementation Method 1
sublimate the slurry at a third temperature that is greater than the second temperature to form a vapor
Implementation Method 2
a vacuum source, connected to the second vessel via a third conduit, configured to evaporate the inert fluid out of the second vessel
Implementation Method 3
a third vessel connected to the second vessel via a second conduit configured to flow the vapor from the second vessel to the third vessel, wherein the third vessel is configured to operate at a fourth temperature and a fifth temperature
Data Source
AI summary
Various embodiments of the present technology may provide a first vessel to contain a slurry of a solid precursor powder and an inert liquid, a second vessel to receive the slurry, evaporate the inert liquid, and sublimate the solid precursor powder a first time to form a vapor, a third vessel to recondense the vapor back into a solid state and sublimate the solid precursor a second time to form a vapor, and a reaction chamber to receive the vapor from the third vessel.