Solid Source Vaporizer with Serpentine Paths for Uniform Reactant Delivery
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Solution Overview
Problem
Current semiconductor processing systems face challenges in efficiently vaporizing and delivering solid source chemicals to multiple deposition chambers, leading to issues with uniformity and efficiency in chemical vapor deposition and atomic layer deposition processes.
Innovation Solution
A solid source chemical vaporizer system is designed with multiple serpentine paths and valves, allowing for parallel or series fluid connections, and a multiple chamber deposition module that includes a solid source chemical vaporizer to supply vapor phase reactants to multiple reaction chambers, enabling precise control and efficient delivery of reactants.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single tray with simple path is used in the vaporizer, then the device complexity is reduced, but the manufacturing precision and uniformity of reactant vapor delivery deteriorates
Solution Approach 1:
The vaporizer tray is divided into multiple serpentine paths that segment the reactant flow, ensuring uniform distribution across the tray surface. This segmentation allows each path to deliver vapor consistently, improving manufacturing precision without requiring an overly complex overall structure.
Solution Approach 2:
The serpentine path design introduces a dimensional aspect to the vapor delivery system, creating a winding two-dimensional path on the tray surface. This dimensional approach ensures uniform coverage and vapor distribution, improving delivery uniformity while maintaining a relatively simple single-tray structure.
2Manufacturing precision
If multiple trays with serpentine paths are used in the vaporizer, then the reactant vapor delivery uniformity is improved, but the device complexity increases
Solution Approach 1:
Multiple serpentine paths are merged into a single integrated tray structure, allowing uniform vapor delivery across multiple zones while maintaining a unified device architecture. This merging approach improves delivery uniformity without proportionally increasing device complexity.
Solution Approach 2:
The serpentine path design provides multi-functionality within each tray, serving both as a structural support and as a vapor distribution network. This universal design improves vapor delivery uniformity while minimizing additional structural complexity.
3Productivity
If multiple valves are added to control parallel paths, then the productivity and control efficiency are improved, but the device complexity increases
Solution Approach 1:
The valve system is designed to be dynamically controllable, allowing selective activation of different serpentine paths based on process requirements. This dynamic control improves productivity by enabling efficient reactant delivery to multiple chambers while managing device complexity through selective operation.
Solution Approach 2:
The vaporizer system is designed to self-regulate vapor distribution across multiple paths, reducing the need for complex external control mechanisms. The inherent design of the serpentine paths facilitates self-balancing vapor flow, improving productivity while minimizing additional valve complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system ensures consistent and efficient delivery of vaporized reactants to multiple deposition chambers, enhancing the uniformity and efficiency of chemical vapor deposition and atomic layer deposition processes, thereby improving the quality and yield of thin film formation.
Implementation Method 1
The heating means heats up the vessel to vaporize the reactant in the vessel
Implementation Method 2
The carrier gas sweeps reactant vapor along with it through the vessel outlet and ultimately to a substrate reaction chamber
Data Source
AI summary
Herein disclosed are systems and methods related to solid source chemical vaporizer vessels and multiple chamber deposition modules. In some embodiments, a solid source chemical vaporizer includes a housing base and a housing lid. Some embodiments also include a first and second tray configured to be housed within the housing base, wherein each tray defines a first serpentine path adapted to hold solid source chemical and allow gas flow thereover. In some embodiments, a multiple chamber deposition module includes first and second vapor phase reaction chambers and a solid source chemical vaporizer vessel to supply each of the first and second vapor phase reaction chambers.