CMOS-Compatible Solid-State Battery Fabrication via Lithiation
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Solution Overview
Problem
Existing methods for fabricating solid-state thin film Li-ion batteries are time-consuming and not compatible with CMOS processing, leading to contamination issues and complexity in material preparation.
Innovation Solution
A method involving the deposition of an initial Li-free layer stack on a substrate, followed by a lithiation step using a Li compound to form a battery half-cell or cell stack with a reduced number of process steps, including a single annealing step, which is compatible with CMOS processing and reduces material complexity and contamination risks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If traditional separate preparation methods are used for battery components, then material quality can be maintained, but the fabrication process becomes time-consuming and complex
Solution Approach 1:
The patent combines multiple separate component preparation steps into a single co-deposition process. The battery components (electrodes, electrolyte, current collectors) are deposited simultaneously in one continuous process rather than being prepared separately and assembled, thereby reducing fabrication time and process complexity while maintaining material quality
Solution Approach 2:
The deposition process is designed to perform multiple functions simultaneously: depositing different battery components, forming current collectors, creating electrolyte layers, and assembling the battery structure all in one process step, eliminating the need for separate preparation and assembly operations
2Ease of manufacture
If Li-containing materials are used in CMOS processing facilities, then battery fabrication can proceed, but serious contamination issues arise
Solution Approach 1:
The patent segments the fabrication process into two distinct parts: first, depositing Li-free battery components in the CMOS facility; second, adding Li-containing materials in a separate post-processing step outside the CMOS facility. This segmentation eliminates Li contamination in the CMOS environment while still enabling complete battery fabrication
Solution Approach 2:
The Li-containing step is extracted and removed from the CMOS processing sequence, to be performed separately after the Li-free components are deposited in the CMOS facility. This extraction eliminates the contamination problem while preserving the benefits of CMOS-compatible fabrication for the majority of the battery structure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method simplifies the fabrication process, reduces material usage, enhances cyclic performance, and allows for high-throughput production of thin film batteries with reduced safety risks and lower costs, while maintaining compatibility with CMOS processing.
Implementation Method 1
performing a thermal treatment, thereby inducing a solid-state reaction between the Li compound and the material compounds of the Li-free layers of the initial layer stack
Implementation Method 2
depositing on a substrate an initial layer stack comprising a first Li-free layer comprising a first electrode material compound and a second Li-free layer comprising an electrolyte material compound
Implementation Method 3
The layer comprising the Li compound may for example be provided by solution processing, such as for example by spin coating
Implementation Method 4
performing a thermal treatment, thereby inducing a solid-state reaction between the Li compound and the material compounds of the Li-free layers of the initial layer stack
Data Source
Figure 1(a)~2
Figure 3(a)~4
Figure 5(a)~5(c)
AI summary
A method is provided for fabricating a thin film solid-state Li-ion battery comprising a first electrode layer, a solid electrolyte layer and a second electrode layer. The method comprises: depositing (101) on a substrate an initial layer stack comprising a first Li-free layer comprising a first electrode material compound and a second Li-free layer comprising an electrolyte material compound; and afterwards performing a lithiation step (102), the lithiation step comprising incorporating Li in the first layer and in the second layer, thereby forming a stack of a first electrode layer and a solid electrolyte layer. The initial layer stack may further comprise a third Li-free layer comprising a second electrode material compound. By performing the lithiation step, Li is also incorporated in the third layer, such that a stack of a first electrode layer, a solid electrolyte layer and a second electrode layer is formed.