Solid-State Diode With Segmented PN Junctions for Leakage Control

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional solid-state diodes suffer from parasitic effects that restrict their functional reliability, particularly in voltage stabilization and overvoltage protection applications, due to unpredictable breakdown locations and significant production-related scatter in breakdown voltage.

Innovation Solution

The solid-state diode design features self-aligning pn junctions with masking areas ensuring the cathode and anode regions are at the same electrical potential, creating a constricted junction and a parasitic MIS capacitor to counteract GIDL effects, and using ion implantation for precise doping with different mobilities to control the expansion of doped regions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the width of pn junction is kept relatively narrow to limit breakdown location, then breakdown location is constrained, but parasitic effects still occur restricting functional reliability

Engineering Contradiction:
Improvefunctional reliabilityVSAvoidparasitic effects
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The pn junction is segmented into multiple regions with different doping concentrations and geometries. The junction is divided into a first region with higher doping concentration and a second region with lower doping concentration, creating distinct functional zones that control breakdown location and reduce parasitic effects.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the pn junction are given different local properties through varying doping concentrations. The first region has higher doping concentration for one function while the second region has lower doping concentration for another function, allowing optimization of different areas for different purposes.

Inventive Principle:
Principle #3Local quality

2Ease of manufacture

If conventional diode design with large width p and n regions is used, then manufacturing is easier, but breakdown location cannot be foreseen and parasitic currents increase

Engineering Contradiction:
Improveease of manufactureVSAvoidbreakdown voltage precision
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The doping process is performed in a predetermined sequence with the first dopant applied before the second dopant. This preliminary action establishes the doping concentration gradient before final device formation, ensuring precise breakdown voltage control while maintaining manufacturing simplicity.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The sequential doping process allows the device structure to self-organize the doping distribution. The first dopant diffuses to create a base profile, then the second dopant modifies it in situ, eliminating the need for complex post-processing alignment steps.

Inventive Principle:
Principle #25Self-service

3Reliability

If Zener diode combines tunnel breakthrough and avalanche breakthrough mechanisms, then temperature coefficient is reduced, but production-related scatter in breakdown voltage increases

Engineering Contradiction:
Improvevoltage stabilizationVSAvoidbreakdown voltage scatter
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The doping concentration is used as a key parameter to control the breakdown characteristics. By precisely controlling the doping concentration in the first and second regions, the breakdown voltage can be tuned to achieve the desired temperature coefficient while minimizing production scatter through optimized doping profiles.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design ensures reliable and reproducible functionality with reduced leakage current and controlled breakdown voltage, providing enhanced circuit technology properties for voltage stabilization and protection against overvoltages.

Implementation Method 1

a tunnel breakthrough and an avalanche breakthrough

Methodology Applied
Scientific EffectTunnel breakthrough:

Implementation Method 2

an avalanche breakthrough

Methodology Applied
Scientific EffectAvalanche breakthrough: Avalanche Breakdown

Implementation Method 3

the n-doped cathode region is generated by an ion implantation

Methodology Applied
Scientific EffectIon implantation: Ion Implantation

Data Source

PatentEP2549541B1Solid body diode
Publication Date: 2019.10.02 ELMOS SEMICON AG
  • EP2549541B1 patent drawingFigure 1~3
  • EP2549541B1 patent drawingFigure 4~6
  • EP2549541B1 patent drawingFigure 7~8

AI summary

The diode has masking regions (14) made of a material impermeable to ion implantation first masking material, which is formed on upper side of a semiconductor substrate (12). Two opposite limiting edge portions are provided in masking regions. An n-doped cathode zone (22) with cathode terminal box (34), and p-doped anode zone (30) with anode terminal box (36) are provided in substrate in a state projecting into the space between boundary edge portions of masking regions. Either the cathode terminal box or anode terminal box lies at the same electrical potential in masking regions.