Solid State Heater with Graphite and Silicon Carbide

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Solution Overview

Problem

The fabrication of semiconductor devices requires heaters that can operate at elevated temperatures, but existing heaters face challenges such as limited space and harsh environments, necessitating a durable, versatile, and easy-to-manufacture solid state heater.

Innovation Solution

A solid state heater comprising a unitary component with graphite and silicon carbide portions, where graphite conducts electricity and silicon carbide facilitates heat transfer, manufactured through chemical vapor conversion (CVC) and optionally coated for environmental protection, allowing for various shapes and sizes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If radiant heaters or resistive heaters are used to achieve elevated temperatures, then heating capability is improved, but durability and ability to survive harsh environments deteriorates

Engineering Contradiction:

Improveelevated temperature capabilityVSAvoiddurability in harsh environments

Core Design Contradiction:

TemperatureVSReliability

Solution Approach 1:

The heater element uses a composite structure combining graphite (for electrical conductivity and heat generation) and silicon carbide (for oxidation resistance and structural stability). This composite material approach allows the heater to withstand harsh oxidizing environments at elevated temperatures while maintaining heating capability, resolving the contradiction between temperature capability and reliability in harsh environments.

Inventive Principle:

Principle #40Composite materials

2Volume of moving object

If the heater is designed to fit limited space, then space utilization is improved, but manufacturing complexity increases

Engineering Contradiction:

Improveheater sizeVSAvoidmanufacturing difficulty

Core Design Contradiction:

Volume of moving objectVSEase of manufacture

Solution Approach 1:

The heater element is segmented into distinct functional zones: graphite regions for electrical conductivity and heat generation, and silicon carbide regions for oxidation resistance. This segmentation is achieved through controlled chemical vapor deposition patterns, allowing the compact heater design to be manufactured using standardized deposition processes rather than complex custom fabrication.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different regions of the heater element have different material compositions tailored to local functional requirements: graphite where electrical conductivity is needed and silicon carbide where oxidation resistance is critical. This local quality approach enables space-efficient design with optimized performance while using conventional deposition techniques for manufacturing.

Inventive Principle:

Principle #3Local quality

3Adaptability or versatility

If the heater is designed for versatility in shapes and sizes, then adaptability is improved, but manufacturing complexity increases

Engineering Contradiction:

Improveshape and size varietyVSAvoidmanufacturing process complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The manufacturing process uses variable parameters in the chemical vapor deposition (CVD) process, such as gas flow rates, temperature gradients, and deposition time, to control the spatial distribution of graphite and silicon carbide. By changing these parameters, the same basic manufacturing process can produce heaters in various shapes and sizes with different material distributions, achieving versatility without increasing fundamental process complexity.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The heater effectively conducts current and distributes heat, maintaining temperature uniformity and structural integrity, suitable for harsh environments and high-temperature applications up to 2500°C in inert conditions.

Implementation Method 1

Current is conducted through the graphite portion of the unitary structure between two or more terminals

Methodology Applied

Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 2

The silicon carbide does not conduct electricity, but is effective at conducting the heat throughout the unitary component

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 3

chemical vapor conversion (CVC) is used to create the solid state heater

Methodology Applied

Scientific EffectChemical vapor deposition: Chemical Vapour Deposition

Data Source

PatentUS11665786B2Solid state heater and method of manufacture

Publication Date: 2023.05.30 APPLIED MATERIALS INC

AI summary

A solid state heater and methods of manufacturing the heater is disclosed. The heater comprises a unitary component that includes portions that are graphite and other portions that are silicon carbide. Current is conducted through the graphite portion of the unitary structure between two or more terminals. The silicon carbide does not conduct electricity, but is effective at conducting the heat throughout the unitary component. In certain embodiments, chemical vapor conversion (CVC) is used to create the solid state heater. If desired, a coating may be applied to the unitary component to protect it from a harsh environment.