Solid-State Laser Beam Scanner for High-Speed Micromachining Precision

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Solution Overview

Problem

Conventional galvanometer scanners in laser micromachining devices suffer from mirror vibration, shaft breakage, mechanical wear, backlash, and positional uncertainty, limiting precision and speed, with scanning speeds typically between five and 50 meters per second.

Innovation Solution

A solid-state, non-moving laser beam scanner replaces traditional galvanometer scanners, utilizing a substrate plate assembly with quantum dots and a control unit to steer laser beams, enabling high-speed scanning up to hundreds of meters per second with improved precision and reduced failure rates.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If galvanometer scanners are used to steer laser beams, then the system can achieve precise beam positioning, but the scanning speed is limited to between five and 50 meters per second due to mechanical inertia and vibration

Engineering Contradiction:
Improvescanning speedVSAvoidbeam positioning precision
Core Design Contradiction:
SpeedVSMeasurement precision

Solution Approach 1:

The patent replaces the mechanical galvanometer scanner system with an acousto-optic modulator (AOM) based system. The AOM uses sound waves to create diffraction gratings that steer the laser beam without any moving mechanical parts, eliminating inertia and vibration limitations while achieving scanning speeds of hundreds of meters per second while maintaining positioning precision through electronic control.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the operating parameters by using acoustic frequency modulation in the AOM to control beam steering. By varying the acoustic frequency and amplitude, the system can rapidly change beam position and scanning speed without mechanical constraints, enabling speeds up to hundreds of meters per second while maintaining precision through controlled acoustic field parameters.

Inventive Principle:
Principle #35Parameter changes

2Productivity

If galvanometer scanners operate at high speeds, then productivity increases, but mechanical wear, shaft breakage, and backlash increase causing system failure

Engineering Contradiction:
Improvemicromachining throughputVSAvoidscanner reliability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent eliminates the mechanical galvanometer scanner entirely and replaces it with an acousto-optic modulator system that uses sound waves to steer the laser beam. This solid-state approach has no moving parts, shafts, or mechanical wear components, enabling high-speed operation at hundreds of meters per second without mechanical failure, thereby dramatically improving both productivity and reliability.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent employs acousto-optic modulators that can be rapidly replaced if needed, and the acoustic fields used for beam steering are transient and can be switched on and million times per second without degradation. This approach allows for high-productivity operation where the system can be quickly replaced or reset without mechanical wear accumulation.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

3Manufacturing precision

If galvanometer scanners are used for precise micromachining, then manufacturing precision is maintained, but the device complexity and mechanical component count increase

Engineering Contradiction:
Improvemicromachining precisionVSAvoidscanner system complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent replaces the complex mechanical galvanometer scanner assembly with a compact acousto-optic modulator device. The AOM uses acoustic waves in a crystal or glass medium to create programmable diffraction gratings for beam steering, eliminating motors, shafts, mirrors, and mechanical linkages. This reduces device complexity while maintaining micromachining precision through electronic control of acoustic parameters.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent makes the acousto-optic modulator perform multiple functions: beam steering, beam positioning, and scanning pattern generation, all through electronic control of acoustic fields. This single device replaces what previously required multiple mechanical components (motors, encoders, mirrors, positioners), reducing overall system complexity while maintaining precision through unified electronic control.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solid-state scanner achieves increased linear scanning speeds and precision, overcoming the limitations of traditional systems by modulating the electromagnetic environment of quantum dots to deflect laser beams at frequencies up to 100 GHz, resulting in faster and more accurate micromachining.

Implementation Method 1

utilizing a substrate plate assembly with quantum dots and a control unit to steer laser beams, enabling high-speed scanning up to hundreds of meters per second

Methodology Applied
Scientific EffectQuantum dot electromagnetic modulation: Electro-Optic Effects

Implementation Method 2

modulating the electromagnetic environment of quantum dots to deflect laser beams at frequencies up to 100 GHz

Methodology Applied
Scientific EffectLaser beam deflection through electromagnetic modulation: Electromagnetic Induction

Data Source

PatentUS11491578B2High speed solid state micromachining device
Publication Date: 2022.11.08 NANOVERSE TECH INC
  • US11491578B2 patent drawing
  • US11491578B2 patent drawing
  • US11491578B2 patent drawing

AI summary

A micromachining device that utilizes a solid state laser beam scanner to steer and scan laser beams onto a moveable stage. There are no moving parts as in the galvometric scanner devices in current use. The laser beam scanner has two components, a variable frequency signal generator that is electrically connected to at least one substantially transparent and partially conductive substrate plate (hereinafter plate) with a generally planar face thereon that has a series of quantum dots (of an arbitrary size but narrow size distribution) affixed with the plate, where each of the quantum dots possess an inducible dipole moment, and each of the quantum dots are in electrical contact with the plate, where the quantum dots undergo an excitation and successive recombination (or relaxation) by the input of magnetic, optical or electrical signals.