Solid-State Qubit Thin Film Production via Sealed Chamber Segmentation

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Solution Overview

Problem

Current quantum computing devices based on solid-state components face limitations in coherence time due to interactions with their environment, particularly defects and phonons, which shorten the stability of quantum states, making them unsuitable for effective quantum computing.

Innovation Solution

A method involving the production of solid-state components with reduced defects by depositing thin films of specific materials between a monolayer and 100 nm thickness in a sealed reaction chamber, using electromagnetic radiation for substrate preparation, material evaporation, and controlled cooling to minimize defects and enhance coherence times.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional solid-state components are used for quantum computing, then the manufacturing process is simple, but the coherence time is limited to around 1 ms due to defects and environmental interactions

Engineering Contradiction:
Improvecoherence timeVSAvoidproduction process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The production process is segmented into distinct stages: substrate preparation in a first reaction atmosphere, deposition in a second reaction atmosphere, and cooling in a third reaction atmosphere. Each stage is optimized independently to minimize defects at critical phases, thereby extending coherence time without overwhelming complexity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The substrate surface is prepared in advance by heating it to a predetermined temperature in a first reaction atmosphere before deposition begins. This preliminary action ensures optimal surface conditions for defect-free deposition, which directly improves coherence time

Inventive Principle:
Principle #10Preliminary action

Solution Approach 3:

A sealed reaction chamber serves as an intermediary environment that isolates the deposition process from ambient atmosphere. The chamber maintains controlled reaction atmospheres throughout production, preventing contamination that would otherwise limit coherence time

Inventive Principle:
Principle #24Intermediary (Mediator)

2Manufacturing precision

If thin films are deposited to reduce defects and improve coherence time, then the manufacturing precision increases, but the device complexity increases due to multiple process steps

Engineering Contradiction:
Improvethin film deposition precisionVSAvoidnumber of process steps
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

Multiple process steps (substrate preparation, deposition, and cooling) are merged into a single continuous operation within one sealed reaction chamber. The chamber transitions between different reaction atmospheres without breaking vacuum or exposure to ambient conditions, reducing overall complexity despite increased precision requirements

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The sealed reaction chamber performs multiple functions: it serves as the containment environment for substrate preparation, the deposition chamber, and the cooling environment. This multi-functionality allows high-precision thin film deposition without requiring separate dedicated chambers for each step

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Manufacturing precision

If the substrate is heated to prepare the surface for deposition, then the manufacturing precision improves, but the energy consumption increases

Engineering Contradiction:
Improvesubstrate surface preparation qualityVSAvoidenergy for substrate heating
Core Design Contradiction:
Manufacturing precisionVSUse of energy by moving object

Solution Approach 1:

The substrate temperature is dynamically adjusted to a predetermined optimal value for surface preparation, then reduced afterward. This parameter change ensures high manufacturing precision during the critical deposition phase while minimizing energy consumption during non-critical phases

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method results in solid-state components with significantly reduced defects, enabling qubit structures with relaxation and coherence times exceeding 100 μs, suitable for advanced quantum computing applications.

Implementation Method 1

Preparing the substrate surface by heating the substrate with a first electromagnetic radiation coupled into the reaction chamber

Methodology Applied
Scientific EffectElectromagnetic radiation heating: Dielectric Heating

Implementation Method 2

Evaporating and/or sublimating the first material by heating a source element comprising the first material by a second electromagnetic radiation coupled into the reaction chamber

Methodology Applied
Scientific EffectElectromagnetic radiation heating: Dielectric Heating

Implementation Method 3

Evaporating and/or sublimating the first material

Methodology Applied
Scientific EffectEvaporation: Evaporation

Implementation Method 4

Evaporating and/or sublimating the first material

Methodology Applied
Scientific EffectSublimation: Sublimation

Implementation Method 5

Illuminating the one or more thin films and/or the substrate with a third electromagnetic radiation coupled into the reaction chamber for forming the solid-state component and for tempering and/or controlled cooling

Methodology Applied
Scientific EffectElectromagnetic radiation illumination: Light

Data Source

PatentUS20240284805A1Method for producing a solid-state component, solid-state component, quantum component and apparatus for producing a solid-state component
Publication Date: 2024.08.22 MAX PLANCK GESELLSCHAFT ZUR FOERDERUNG DER WISSENSCHAFTEN EV
  • US20240284805A1 patent drawing
  • US20240284805A1 patent drawing
  • US20240284805A1 patent drawing

AI summary

The invention relates to a method of producing a solid-state component, in particular for a quantum component, preferably for a qubit, comprising one or more thin films, the one or more thin films comprising a first material and each said film having a thickness selected between a monolayer and 100 nm and is deposited onto a substrate surface of a substrate, wherein the production process is carried out in a reaction chamber sealed with respect to the ambient atmosphere. Further, the invention relates to a solid-state component, in particular for a quantum component, preferably for a qubit, comprising one or more thin films, one of the one or more thin films comprises a first material with a thickness between a monolayer and 100 nm and is deposited onto a substrate surface of a substrate. In addition, the invention relates to a quantum component comprising such a solid-state component according to the present invention and to an apparatus for producing such a solid-state component according to the present invention.