Solid Source Sublimator Filtration for Condensation-Free Vapor Delivery

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Solution Overview

Problem

Existing solid or liquid source reactant delivery systems face challenges in efficiently vaporizing low-vapor-pressure chemicals and preventing condensation in valves and conduits, leading to inefficiencies in chemical vapor deposition and atomic layer deposition processes.

Innovation Solution

A solid source chemical sublimator system with a housing, filter, and heating mechanism that restricts the passage of solid reactants through a porosity-controlled filter, allowing controlled vaporization and delivery of reactants to substrate reaction chambers, maintaining vapor phase reactants above condensation temperature.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a filter is added to prevent solid reactant passage, then reliability is improved, but device complexity increases

Engineering Contradiction:

Improveprevention of solid reactant cloggingVSAvoidsystem structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

A filter is introduced as an intermediary component between the reactant source and the vaporization chamber. This filter selectively allows vapor to pass through while blocking solid reactant particles, preventing clogging in downstream components without significantly complicating the overall system architecture.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The filter utilizes porous material structure with specific pore sizes that permit vapor molecules to pass through while physically blocking larger solid reactant particles. This approach provides reliable solid particle separation while maintaining vapor flow efficiency and keeping the filter component compact.

Inventive Principle:

Principle #31Porous materials

2Productivity

If heating is increased to enhance vaporization, then productivity is improved, but risk of condensation in conduits increases

Engineering Contradiction:

Improvereactant vaporization rateVSAvoidcondensation in valves and conduits

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

The system pre-heats the conduits and valves before introducing the vaporized reactant. This preliminary heating action ensures that downstream components are already at sufficient temperature to prevent condensation, allowing high vaporization rates without the harmful condensation effect.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The system maintains temperature parameters above the condensation point throughout the vapor delivery pathway. By controlling and maintaining elevated temperatures in conduits and valves, the system enables high productivity vaporization while preventing the harmful condensation effect in downstream components.

Inventive Principle:

Principle #35Parameter changes

3Productivity

If vaporization temperature is raised to increase saturation rate, then productivity is improved, but energy consumption increases

Engineering Contradiction:

Improvereactant saturation rateVSAvoidheating energy

Core Design Contradiction:

ProductivityVSUse of energy by moving object

Solution Approach 1:

The system implements continuous heating of both the reactant source and the vapor delivery pathway. This continuous thermal action maintains vapor above condensation temperature throughout the entire process, enabling sustained high saturation rates without energy waste from condensation and re-vaporization cycles.

Inventive Principle:

Principle #20Continuity of useful action

Solution Approach 2:

The system optimizes temperature parameters to maintain vapor above condensation point while achieving required saturation rates. By carefully controlling temperature parameters throughout the vapor pathway, the system achieves high productivity with minimized energy consumption, avoiding the need for excessive heating.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances the efficiency of chemical vapor deposition and atomic layer deposition processes by ensuring consistent vapor phase reactant delivery, reducing condensation risks, and allowing for higher reactant saturation rates and longer processing times without clogging.

Implementation Method 1

The filter can have a porosity configured to restrict a passage of a solid chemical reactant therethrough

Methodology Applied

Scientific EffectPorosity: Porosity

Implementation Method 2

A solid source chemical sublimator can include a housing configured to hold solid chemical reactant therein

Methodology Applied

Scientific EffectSublimation: Sublimation

Implementation Method 3

The lid can include a fluid inlet and a fluid outlet and define a serpentine flow path within a distal portion of the lid

Methodology Applied

Scientific EffectConvection: Convection

Data Source

PatentUS12540391B2Solid source sublimator

Publication Date: 2026.02.03 ASM IP HLDG BV

AI summary

Herein disclosed are systems and methods related to solid source chemical sublimator vessels and corresponding deposition modules. The solid source chemical sublimator can include a housing configured to hold solid chemical reactant therein. A lid may be disposed on a proximal portion of the housing. The lid can include a fluid inlet and a fluid outlet and define a serpentine flow path within a distal portion of the lid. The lid can be adapted to allow gas flow within the flow path. The solid source chemical sublimator can include a filter that is disposed between the serpentine flow path and the distal portion of the housing. The filter can have a porosity configured to restrict a passage of a solid chemical reactant therethrough.