Solid Target Replenishment Timing to Prevent EUV Funnel Clogging

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing EUV light generation systems face issues with clogging and inefficient replenishment of solid target substances due to overlapping drops into the funnel, requiring long reciprocal movement times to prevent interference, which affects the stability and efficiency of the target substance supply.

Innovation Solution

A solid target substance replenishment device with a delivery device that includes a tube, delivery rod, and drive unit, where the drive unit controls the delivery rod to ensure a drop time difference of more than 1.1 seconds between successive drops into the funnel, stabilizing the supply process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the reciprocal movement time of the delivery rod is extended to prevent overlapping drops, then clogging is prevented, but the replenishment efficiency decreases

Engineering Contradiction:

Improvesupply stabilityVSAvoidreplenishment efficiency

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The delivery rod performs reciprocating movements with a specific period, where each reciprocal movement delivers exactly one solid target substance. By controlling the period and timing of these periodic actions, the system ensures that drops are delivered at regular intervals with a time difference of 1.1 seconds or more, preventing clogging while maintaining efficient replenishment throughput.

Inventive Principle:

Principle #19Periodic action

Solution Approach 2:

The control unit monitors and controls the reciprocating movement of the delivery rod to maintain the required drop time difference. By implementing feedback control on the delivery timing, the system can adjust the reciprocating movement parameters to ensure reliable supply stability without excessive delays, thereby resolving the contradiction between preventing clogging and maintaining replenishment efficiency.

Inventive Principle:

Principle #23Feedback

2Productivity

If multiple solid target substances are delivered in one reciprocal movement, then replenishment efficiency increases, but clogging occurs in the funnel

Engineering Contradiction:

Improvereplenishment efficiencyVSAvoidsupply stability

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The delivery process is segmented such that each reciprocal movement of the delivery rod delivers exactly one solid target substance through the funnel. This segmentation prevents multiple substances from overlapping and clogging the funnel, while the repeated sequential execution of these segmented deliveries maintains overall replenishment efficiency.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The system uses periodic reciprocating movements of the delivery rod, where each period corresponds to delivering one solid target substance. This periodic action with controlled frequency ensures that substances are delivered one at a time with sufficient time intervals, preventing clogging while achieving the required replenishment rate through the repetition of the cycle.

Inventive Principle:

Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution prevents clogging and ensures stable, efficient replenishment of solid target substances, enhancing the reliability and efficiency of the EUV light generation system by maintaining a controlled drop timing.

Implementation Method 1

a funnel that guides, to a molten target container of an extreme ultraviolet light generation apparatus, the solid target substance having dropped after passing through the second path

Methodology Applied

Scientific EffectGravity: Gravitation

Implementation Method 2

a molten target container configured to melt a solid target substance replenished by the solid target substance replenishment device to produce a molten target substance

Methodology Applied

Scientific EffectMelting: Melting

Implementation Method 3

a laser device configured to irradiate, with pulse laser light, the molten target substance reaching a redetermined region after being output from the nozzle

Methodology Applied

Scientific EffectLaser heating: Laser

Implementation Method 4

extreme ultraviolet light emitted from plasma generated in the predetermined region

Methodology Applied

Scientific EffectPlasma generation: Plasma

Implementation Method 5

an EUV light concentrating mirror configured to concentrate extreme ultraviolet light emitted from plasma generated in the predetermined region

Methodology Applied

Scientific EffectLight concentration: Focusing

Data Source

PatentUS20250301560A1Solid target substance replenishment device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method

Publication Date: 2025.09.25 GIGAPHOTON INC

AI summary

A solid target substance replenishment device includes a solid target container containing a solid target substance; a first path through which the solid target substance supplied from the solid target container passes; a delivery device including a tube receiving the solid target substance having passed through the first path, a delivery rod delivering the solid target substance in the tube in a length direction thereof, and a drive unit reciprocating the delivery rod in the length direction; a second path through which the solid target substance delivered by the delivery device passes; and a funnel guiding, to a molten target container, the solid target substance having dropped thereto. The drive unit drives the delivery rod so that drop time difference is longer than 1.1 seconds when two or more solid target substances drop from the second path into the funnel by one reciprocal movement of the delivery rod.