Solid Target Replenishment Stopper for Anti-Clogging Delivery
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Solution Overview
Problem
Existing solid target substance replenishment systems in EUV light generation apparatuses face issues such as biting and clogging due to variations in the diameter and shape of solid target substances, leading to operational inefficiencies and potential deformation of the target substances.
Innovation Solution
A delivery device with a stopper mechanism that moves alternately forward and backward in the tube, forming a passage for the target substance during forward movement and restricting its return during backward movement, using a stopper that pivots in a plane perpendicular to the direction of target substance flow to prevent biting and clogging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional delivery mechanism is used for solid target substances, then the structure is simple, but biting and clogging occur due to variations in diameter and shape
Solution Approach 1:
The stopper is designed to move dynamically between a first position (allowing target substance passage) and a second position (restricting passage). This dynamic positioning enables the system to adapt to variations in target substance diameter and shape, preventing biting and clogging while maintaining delivery stability without requiring overly complex fixed structures
Solution Approach 2:
The stopper acts as an intermediary element between the target substance and the delivery system. By positioning the stopper at specific locations within the delivery device, it mediates the interaction between the varying target substances and the delivery mechanism, ensuring reliable passage while preventing harmful biting and clogging effects
2Productivity
If the delivery rod moves continuously forward, then delivery speed is high, but target substance cannot be replenished in the tube
Solution Approach 1:
The delivery rod performs periodic reciprocating movements instead of continuous forward motion. During the forward stroke, target substance is delivered at high speed; during the backward stroke, new target substance is replenished into the tube. This periodic action pattern ensures both high delivery productivity and continuous supply, preventing downtime in the delivery process
Solution Approach 2:
The reciprocating movement of the delivery rod ensures continuous useful action by alternating between delivery and replenishment phases. While the rod moves backward to allow replenishment, the system maintains operational continuity, ensuring that the target substance supply to the molten target container never stops, thereby maintaining constant productivity
3Reliability
If the stopper restricts target substance passage, then biting and clogging are prevented, but delivery efficiency decreases
Solution Approach 1:
The stopper dynamically switches between restrictive and permissive states. During the forward movement phase, the stopper is positioned to allow efficient target substance passage. During the backward movement phase, it restricts passage to prevent biting and clogging. This dynamic behavior ensures both high delivery efficiency and reliable prevention of delivery issues
Solution Approach 2:
The stopper operates periodically, alternating between allowing passage (during forward rod movement) and restricting passage (during backward rod movement). This periodic operation ensures that restrictive actions occur only when necessary for preventing biting and clogging, while maintaining high delivery efficiency during the forward stroke, thus balancing reliability and productivity
Data Source
AI summary
A solid target substance replenishment device includes a solid target container, a first path through which a solid target substance passes, a delivery device, and a second path through which the solid target substance delivered by the delivery device is replenished to a molten target container. The delivery device includes a tube including a receiving port for receiving the solid target substance having passed through the first path and a facing surface; a delivery rod delivering the solid target substance; and a stopper forming a passage through which the solid target substance between the receiving port and the facing surface is moved in the tube by being moved toward an outside of the tube when the delivery rod moves forward, and restrict the target substance from returning between the receiving port and the facing surface by being moved toward an inside of the tube when the delivery rod moves backward.