Thermally Conductive Reagent Support Panel for Solid Vaporizer

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Solution Overview

Problem

Existing vaporizer vessels for solid materials require complex and labor-intensive filling processes due to individual trays that need precise alignment and cleaning, leading to increased costs and risks of contamination.

Innovation Solution

The use of thermally conductive reagent support panels within the vaporizer vessel body allows for bulk filling in a horizontal orientation, simplifying the filling process and reducing contamination risks, while also providing structural strength and efficient heat transfer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If individual trays are used to distribute solid materials in standard vaporizer vessels, then vaporization performance and material distribution consistency are improved, but filling complexity and labor requirements increase significantly

Engineering Contradiction:
Improvevaporization performance consistencyVSAvoidfilling process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges multiple individual trays into a single integrated support structure with distributed material compartments. This consolidation maintains the vaporization performance benefits of multiple material zones while eliminating the complexity of handling and assembling separate trays, achieving both reliability improvement and complexity reduction simultaneously

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The support structure serves multiple functions: it distributes solid materials, provides thermal conduction paths, creates vapor flow channels, and maintains structural integrity. This multi-functionality eliminates the need for separate tray components, reducing filling complexity while preserving vaporization performance through integrated design

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Manufacturing precision

If multiple individual trays are assembled in standard vaporizer vessels, then material distribution control is improved, but time required for filling and assembly increases

Engineering Contradiction:
Improvematerial distribution controlVSAvoidfilling and assembly time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The support structure is pre-configured with integrated material compartments and distribution channels during manufacturing. This preliminary preparation allows solid materials to be loaded directly into the vessel without time-consuming assembly operations, maintaining precise material distribution control while significantly reducing filling time

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

By combining multiple tray functions into a single integrated support structure, the patent eliminates the sequential assembly steps required for individual trays. The merged structure provides built-in material distribution pathways that maintain precision while enabling rapid, single-step filling operations

Inventive Principle:
Principle #5Merging (Combining)

3Reliability

If standard vaporizer vessels with individual trays are used, then vaporization consistency is maintained, but cleaning difficulty and contamination risk increase

Engineering Contradiction:
Improvevaporization consistencyVSAvoidcleaning ease
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The integrated support structure merges the functions of multiple trays into a single cleanable component with smooth, continuous surfaces. This eliminates the numerous crevices and assembly interfaces between separate trays where contamination accumulates, making cleaning easier while preserving vaporization consistency through uniform thermal and material distribution

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The support structure incorporates controlled porosity and open-cell configurations that allow vapor flow while preventing material accumulation in dead zones. This porous design maintains vaporization consistency through uniform heat and mass transfer while eliminating the contamination traps found in traditional tray assemblies, facilitating easier cleaning

Inventive Principle:
Principle #31Porous materials

4Quantity of substance

If individual trays with outer diameter close to inner diameter of vessel are used, then material utilization is improved, but insertion precision requirements increase

Engineering Contradiction:
Improvematerial utilizationVSAvoidinsertion precision
Core Design Contradiction:
Quantity of substanceVSManufacturing precision

Solution Approach 1:

The integrated support structure is segmented into multiple distributed material compartments rather than requiring a single large tray. This segmentation allows materials to be loaded into smaller, more manageable sections with standard tolerances, eliminating the need for high-precision insertion of large-diameter trays while maintaining effective material utilization through the distributed compartment design

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution reduces the complexity and cost of filling vaporizer vessels, enhances structural integrity, and maintains effective vaporization performance, making it more efficient and cost-effective for large-scale applications.

Implementation Method 1

at least one thermally conductive reagent support panel located within the interior volume and joined to the vaporizer vessel body at the inner surface with a thermally conducting joint

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

an inlet configured for introducing carrier gas to the interior volume of the vaporizer vessel for the carrier gas to flow through the interior volume in contact with the vaporizable solid source material so as to form a carrier gas/solid source vapor mixture

Methodology Applied
Scientific EffectGas flow: Convection

Data Source

PatentUS12312685B2Solids vaporizer
Publication Date: 2025.05.27 ENTEGRIS INC
  • US12312685B2 patent drawing
  • US12312685B2 patent drawing
  • US12312685B2 patent drawing

AI summary

Vaporizer vessels include one or more reagent support panels, serving as dividers of interior space of the vessel, in a vertical orientation such as when filling the vaporizer vessels, and when rotated into a horizontal orientation, the panels support the vaporizable solid materials placed in one or more chambers formed by the panels and interior walls of the vessels and enable transfer of heat to those solid materials. The chambers are such that any or all chambers filled with the vaporizable solid materials provide a void space to allow the solid materials to vaporize and for gas to move through the vaporizer vessels when heated, to allow effective vaporization of the solid materials and further allow the vapor resulting from the solid materials to move to an outlet of the vessels where it can be provided as part of a process.