Solution Treatment Apparatus Relay Unit for Foreign Substance Removal
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Solution Overview
Problem
The existing solution treatment apparatuses for applying high-viscosity coating solutions in semiconductor manufacturing face productivity issues due to the formation of threadlike foreign substances that clog exhaust paths and require time-consuming cleaning steps, especially during the drying process of thick coating films.
Innovation Solution
The apparatus incorporates a relay unit projecting from the inner peripheral surface of the cup unit towards the coating solution collection unit, allowing solvent to drip and dissolve threadlike foreign substances without degrading productivity, enabling efficient removal of foreign substances during substrate back surface and edge cleaning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a collection member in mesh shape is provided above exhaust path to collect threadlike foreign substance, then the exhaust path is protected from clogging, but the device complexity increases and additional cleaning steps are required
Solution Approach 1:
The invention extracts the harmful threadlike foreign substances from the exhaust path by providing a collection member that collects these substances. The collection member is positioned to intercept threadlike foreign substances before they can clog the exhaust path, thereby protecting the exhaust functionality while using a relatively simple mesh structure.
Solution Approach 2:
The collection member performs preliminary collection of threadlike foreign substances during the coating solution application process. By collecting these substances in advance before they can cause clogging, the exhaust path remains functional without requiring complex preventive structures or additional cleaning steps.
2Reliability
If a collection member cleaning step is added to remove threadlike foreign substance, then the exhaust path is maintained, but the processing time increases significantly
Solution Approach 1:
The collection member is designed to be automatically cleaned by the coating solution itself during the normal coating process. The coating solution flows through the collection member, dissolving and removing collected threadlike foreign substances without requiring separate cleaning steps, thereby maintaining exhaust path cleanliness while preserving processing time.
Solution Approach 2:
The cleaning of the collection member occurs continuously during the coating solution application process rather than requiring separate intermittent cleaning steps. The coating solution continuously flows through the collection member, maintaining its cleaning function throughout the coating process and eliminating additional time loss.
3Manufacturing precision
If coating solution with high viscosity is used to form thick coating film, then the coating film thickness is increased, but threadlike foreign substance is generated and clogs exhaust path
Solution Approach 1:
The invention converts the harmful effect of high-viscosity coating solution generating threadlike foreign substances into a beneficial collection process. The collection member is specifically designed to intercept and collect these threadlike substances that are inevitably generated during high-viscosity coating application, transforming the problem into a manageable collection and removal process that maintains both coating quality and exhaust functionality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for the removal of foreign substances without compromising productivity, as the solvent effectively dissolves and collects threadlike foreign substances during the coating process, eliminating the need for additional cleaning steps and reducing overall processing time.
Implementation Method 1
a solvent supply unit configured to supply a solvent for the coating solution to the coating solution collection unit
Implementation Method 2
a so-called spin coating method is widely used which supplies the coating solution from a nozzle to the wafer during rotation to diffuse the coating solution on the wafer by the centrifugal force
Data Source
AI summary
A solution treatment apparatus includes: a substrate holding unit holds and rotates a substrate; a coating solution supply unit applies a coating solution to the substrate held by the substrate holding unit; a cup unit arranged outside the substrate holding unit in a manner to be able to surround the substrate held by the substrate holding unit; an exhaust path provided between the substrate holding unit and an inner peripheral surface of the cup unit; a coating solution collection unit provided above the exhaust path in a manner to cover the exhaust path and including an opening part communicating in a vertical direction; a solvent supply unit supplies a solvent for the coating solution to the coating solution collection unit; and a relay unit located above the coating solution collection unit and projecting from the inner peripheral surface of the cup unit toward the coating solution collection unit.