Solvent-Treated Chemical Container for Ultra-Pure Liquid Storage
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Solution Overview
Problem
The semiconductor industry faces contamination issues due to trace metal impurities, particles, and organic contaminants in chemical liquids used for manufacturing, which can lead to defects in semiconductor circuits and reduced manufacturing yields.
Innovation Solution
A container with a stainless steel or resin-coated inner surface, treated with water and organic solvents, is designed to minimize the introduction and generation of contaminants, ensuring the chemical liquids used in semiconductor manufacturing meet stringent purity standards.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional containers are used for storing and transporting chemical liquids, then the container structure is simple and easy to manufacture, but metal impurities and particles are introduced into the chemical liquid
Solution Approach 1:
The container is divided into separate functional components: an inner container made of inert material (glass or PTFE) and an outer container made of stainless steel. This segmentation allows each component to serve its specific purpose - the inner container prevents contamination while the outer container provides structural strength and ease of handling.
Solution Approach 2:
The container uses composite construction combining inert materials (glass or PTFE) with stainless steel. The inner container is made of contamination-free material while the outer container provides mechanical strength, creating a composite structure that achieves both purity and structural requirements.
2Reliability
If stainless steel containers are used, then the container has high strength and durability, but metal impurities are generated and introduced into the chemical liquid
Solution Approach 1:
The container separates the structural function (outer stainless steel container) from the chemical contact function (inner inert container). This segmentation prevents direct contact between the chemical liquid and stainless steel, eliminating metal impurity generation while maintaining container strength and durability.
Solution Approach 2:
The inner inert container acts as an intermediary barrier between the chemical liquid and the stainless steel outer container. This mediator prevents direct interaction that would generate metal impurities, while still allowing the outer container to provide its structural benefits.
3Manufacturing precision
If resin-coated containers are used, then metal impurity introduction is reduced, but organic contaminants may be introduced from the resin coating
Solution Approach 1:
The container applies different material qualities to different parts: the inner container uses completely inert material (glass or PTFE) that provides both metal impurity resistance and organic contaminant resistance, while the outer container uses stainless steel for structural purposes only. This local quality differentiation solves both contamination issues.
Solution Approach 2:
The container combines inert materials (glass or PTFE) with stainless steel in a composite structure. The inert inner container prevents both metal and organic contamination, while the stainless steel outer container provides structural support without contacting the chemical liquid.
4Manufacturing precision
If thorough cleaning procedures are applied to remove contaminants, then particle count is reduced, but processing time and complexity increase
Solution Approach 1:
The container is designed with an inert inner surface that prevents contaminant adhesion from the beginning. This preliminary design feature eliminates the need for thorough cleaning procedures, as contaminants do not stick to the inert surface, thereby reducing processing time while maintaining particle count reduction.
Solution Approach 2:
The inert inner container surface automatically prevents contaminant adhesion through its inherent non-stick properties. This self-service characteristic eliminates the need for external cleaning interventions, reducing both time and complexity while maintaining particle count reduction.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The container effectively limits metallic and organic impurities, reducing particle defects and improving semiconductor wafer yields by maintaining ultra-high purity chemical liquids during storage, transport, and processing.
Implementation Method 1
treating the surface of the inner wall with an organic solvent
Implementation Method 2
treating the surface of the inner wall with water
Data Source
AI summary
A container for containing a raw material of a chemical liquid and a method of preparing a container are provided. The container at least includes an inner wall and solvent-treated surface of the inner wall. The method of preparing a container includes treating a surface of the inner wall with water and treating the surface the inner wall with an organic solvent.