Source Gas Concentration Control via Temperature Adjustment
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Solution Overview
Problem
Existing source gas concentration control systems face challenges in maintaining constant concentration and flow rate due to reduced partial pressure of the source gas, leading to valve stroke limitations and inability to control concentration or flow rate effectively.
Innovation Solution
Incorporating a temperature controller that adjusts the tank temperature to increase the partial pressure of the source gas when the valve stroke approaches its limit, allowing for concentration control within the valve's movable range, and using an auxiliary valve to further reduce total pressure if necessary, thereby preventing valve stroke limitations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the first valve stroke is increased to reduce total pressure and maintain constant source gas concentration, then concentration control is improved, but the valve reaches its open limit stroke and can no longer reduce total pressure further
Solution Approach 1:
The system changes the temperature parameter of the source to increase the saturated vapor pressure and partial pressure of the source gas. This allows the first valve to operate within its movable range while maintaining the required concentration, preventing the valve from reaching its open limit stroke.
2Manufacturing precision
If the carrier gas flow rate is increased to maintain constant source gas flow rate when generation amount decreases, then flow rate control is improved, but the carrier gas valve reaches its open limit stroke
Solution Approach 1:
The system changes the temperature parameter of the source to increase the generation amount of source gas. This maintains the source gas flow rate without requiring excessive carrier gas flow rate adjustment, preventing the carrier gas valve from reaching its open limit stroke.
3Manufacturing precision
If the temperature inside the tank is increased to increase partial pressure of source gas, then concentration control capability is improved, but energy consumption increases
Solution Approach 1:
The system uses feedback from the first valve stroke position to trigger temperature adjustment. The temperature is increased only when the valve stroke exceeds the threshold, indicating that partial pressure adjustment is needed. This feedback-based approach minimizes unnecessary energy consumption while maintaining concentration control capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures constant concentration and flow rate control by increasing partial pressure and adjusting valve strokes, preventing valve stroke limits and maintaining control within the valve's range, even with reduced source gas generation.
Implementation Method 1
a source vaporization system including: a tank that contains a source; an inlet line that introduces carrier gas for vaporizing the contained source into the tank
Data Source
AI summary
To prevent loss of control of a pressure of a source gas within a movable range of a control valve, a source gas concentration control system is provided. The system may include a first valve that is provided on an outlet line, a concentration measurement part that measures a concentration of the source gas in mixed gas, and a concentration control part that controls a stroke of the first valve such that the measured concentration of the source gas becomes equal to a predetermined concentration setting. The measured concentration may be measured in the concentration measurement part. The system may further include a temperature controller that controls a temperature inside the tank to meet a temperature setting, and a temperature setting part that sets the temperature setting of the temperature controller.