Source Gas Supply with Inert Gas Replacement Before Heating

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Solution Overview

Problem

Existing film forming source containers deteriorate due to thermal decomposition when filled with certain gases, leading to inefficiencies in the supply of source gases for film formation.

Innovation Solution

A method involving replacing the deteriorating gas in the source container with a non-deteriorating gas, monitored by pressure measurement, ensures the source gas is supplied effectively by heating only after confirmation of gas replacement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the source container is heated to vaporize the film forming source, then the source gas is generated and supplied to the processing part, but the filling gas causes thermal decomposition and deterioration of the source

Engineering Contradiction:

Improvesource gas supply efficiencyVSAvoidsource stability

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The filling gas is replaced with an inert gas (nitrogen or argon) before heating the source container. This preliminary action prevents thermal decomposition of the source during heating, allowing the source to be vaporized and supplied efficiently without deterioration.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent uses nitrogen or argon gas to create an inert atmosphere in the source container during heating. This inert environment prevents oxidative decomposition and thermal degradation of the film forming source, ensuring source stability while maintaining high supply efficiency.

Inventive Principle:

Principle #39Inert atmosphere (Inert environment)

2Reliability

If the filling gas is replaced before heating, then the source is protected from deterioration, but the system complexity increases due to additional gas replacement operations

Engineering Contradiction:

Improvesource stabilityVSAvoidgas replacement system complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The gas supply mechanism is designed to supply both the filling gas (for initial protection) and the inert replacement gas (for heating protection) through the same system. This multi-functional design protects the source at different stages without requiring completely separate gas handling systems, thus limiting the increase in system complexity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The system automatically monitors the heating state and gas replacement status, and controls the gas supply and replacement operations without requiring complex external control systems. The source container system itself manages the gas environment based on its operational state, reducing overall system complexity.

Inventive Principle:

Principle #25Self-service

3Loss of time

If the source container is heated immediately after installation, then the source gas supply process is accelerated, but the source deteriorates due to the presence of the original filling gas

Engineering Contradiction:

Improvesource gas supply timeVSAvoidthermal decomposition

Core Design Contradiction:

Loss of timeVSObject-affected harmful factors

Solution Approach 1:

The gas replacement operation is performed as a preliminary step before heating the source container. This ensures that the harmful filling gas is removed and replaced with inert gas before thermal decomposition can occur, allowing immediate heating without source deterioration.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The inert gas replacement acts as a preliminary countermeasure against thermal decomposition. By establishing the protective inert atmosphere before heating begins, the system prevents the harmful effect of oxygen or reactive filling gases from causing source deterioration during the heating process.

Inventive Principle:

Principle #9Preliminary anti-action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Prevents deterioration of the film forming source, ensuring reliable and efficient supply of source gas for film formation.

Implementation Method 1

determining whether or not the replacement with the replacement gas has been performed by measuring a pressure in the line using a pressure gauge

Methodology Applied

Scientific EffectPressure measurement:

Implementation Method 2

the source gas being generated by vaporizing a film forming source by heating a source container in which the film forming source is stored

Methodology Applied

Scientific EffectVaporization: Evaporation

Data Source

PatentUS12571104B2Source gas supply method, source gas supply mechanism, and film forming system

Publication Date: 2026.03.10 TOKYO ELECTRON LTD

AI summary

A source gas supply method for supplying a source gas to a processing part through a line by a carrier gas is provided. The source gas is generated by vaporizing a film forming source by heating a source container in which the film forming source is stored and a filling gas is filled. The method comprises replacing the filling gas in the source container with a replacement gas that does not deteriorate the source gas, determining whether or not the replacement with the replacement gas has been performed by measuring a pressure in the line using a pressure gauge, and heating the source container and supplying the source gas when it is determined that the replacement with the replacement gas has been performed.