Scanning Probe Microscope Reflective Member Wide Field Imaging

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Solution Overview

Problem

Scanning probe microscopes with relatively large numerical aperture objective lenses face challenges in easily determining measurement locations due to their narrow field of view, requiring significant time and effort.

Innovation Solution

Incorporating a reflective member between the objective lens and the sample, along with a reflecting surface imaging device, allows for a wider field of view and easier location determination by imaging the reflective surface, enabling more efficient positioning of the probe and sample.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a objective lens with relatively large numerical aperture is used, then the resolution and light collection efficiency are improved, but the field of view becomes narrow making it difficult to determine measurement location

Engineering Contradiction:
ImproveresolutionVSAvoidfield of view
Core Design Contradiction:
Measurement precisionVSArea of stationary object

Solution Approach 1:

The imaging function is segmented into two separate paths: one path through the objective lens for high-resolution probe imaging, and another path through a separate imaging lens for wide-field sample surface imaging. This allows each imaging path to be optimized independently for its specific purpose.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A reflective member (mirror) is introduced as an intermediary to redirect light from the sample surface to a separate imaging device. This mediator enables the wide-field imaging path without interfering with the high-resolution imaging path through the objective lens.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Use of energy by moving object

If a objective lens with relatively large numerical aperture is used, then the fluorescence collection efficiency is improved, but the time and effort required to determine measurement location increases

Engineering Contradiction:
Improvefluorescence collection efficiencyVSAvoidtime to determine measurement location
Core Design Contradiction:
Use of energy by moving objectVSLoss of time

Solution Approach 1:

The sample surface is imaged in advance through the separate imaging path to identify and locate the measurement position before initiating the high-resolution fluorescence measurement. This preliminary positioning action prevents time loss during the actual measurement process.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

A reflective member (mirror) is introduced as an intermediary to redirect light from the sample surface to a separate imaging device. This mediator enables the wide-field imaging path without interfering with the high-resolution imaging path through the objective lens.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables rapid and accurate determination of measurement locations, reducing the time and effort required for positioning, even with high numerical aperture objective lenses.

Implementation Method 1

a reflective member arranged between the objective lens and the sample; and a reflecting surface imaging device which images a reflecting surface of the reflective member

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

a scanning probe microscope which uses a diamond (hereinafter referred to as an NV diamond) having nitrogen-vacancy pairs as a probe, irradiates the probe with excitation light and microwaves, and collects fluorescence emitted from the nitrogen-vacancy pairs

Methodology Applied
Scientific EffectFluorescence: Fluorescence

Data Source

PatentUS20240126061A1Scanning probe microscope
Publication Date: 2024.04.18 HITACHI LTD
  • US20240126061A1 patent drawing
  • US20240126061A1 patent drawing
  • US20240126061A1 patent drawing

AI summary

To provide a scanning probe microscope capable of easily determining a measurement location even when a numerical aperture of an objective lens is relatively large. The scanning probe microscope comprises: a probe which scans a sample; a light source which irradiates the probe with excitation light via an objective lens; and a detector which detects fluorescence generated at the probe. The scanning probe microscope further includes: a reflective member arranged between the objective lens and the sample; and an imaging device which images a reflecting surface of the reflective member.