Space Transformer Probe Card Manufacturing Alignment
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Solution Overview
Problem
The manufacturing of space transformers for probe cards is complex due to the need for precise alignment and flatness of probe needles, which can be disrupted during reflow soldering, leading to increased costs and process complexity.
Innovation Solution
A method involving the formation of electrically conductive blocks after mounting second substrates on a first substrate, using photolithography and electroplating, ensures that probe needles are accurately positioned and aligned without post-installation adjustments, even if substrates displace or incline during mounting.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If reflow soldering is used to mount second substrates on the first substrate, then the substrates can be fixed together, but the second substrates may displace from predetermined positions and incline, requiring post-installation adjustment of probe needles
Solution Approach 1:
The patent applies preliminary action by forming the conductive blocks with protruding portions that extend beyond the substrate surface before mounting the second substrates. This pre-formed structure ensures that when second substrates are mounted (even with displacement or inclination), the probe needles can be directly connected to the protruding conductive blocks without requiring post-installation adjustment, thus preserving alignment precision while maintaining manufacturing ease
Solution Approach 2:
The patent uses the protruding portions of the conductive blocks as an intermediary element between the first substrate and the probe needles. These protruding portions serve as a buffer that compensates for mounting inaccuracies, allowing the probe needles to maintain proper alignment and flatness even when the second substrates are displaced or inclined during reflow soldering
2Manufacturing precision
If a single circuit board with multi-layers is used for the space transformer, then the top and bottom contact pads can have different intervals, but the circuit board requires a big number of layers and large thickness, making manufacturing difficult
Solution Approach 1:
The patent applies segmentation by dividing the space transformer into multiple independent substrates (first substrate and second substrates) rather than using a single multi-layered circuit board. Each substrate can have its own contact pads with appropriate intervals, eliminating the need for a complex multi-layered structure with many layers and large thickness, thus reducing device complexity while maintaining the ability to achieve different contact pad intervals
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method simplifies the manufacturing process by ensuring precise alignment and flatness of probe needles, reducing the need for post-installation adjustments and enhancing the reliability of probe card assembly.
Implementation Method 1
forming an insulated layer having a plurality of through holes on each of the second substrates by photolithography
Implementation Method 2
forming a plurality of electrically conductive blocks in the through holes respectively in a way that each of the electrically conductive blocks is fixedly bonded to and electrically connected with one of the second substrates
Data Source
AI summary
A method of manufacturing a space transformer for a probe card includes the steps of mounting and electrically connecting second substrates on a first substrate, forming an insulated layer with through holes on each of the second substrates, and forming electrically conductive blocks in the through holes, respectively. Because the electrically conductive blocks are formed after the second substrates are mounted to the first substrate, any unexpected relative displacement of the first and second substrates during mounting is uninfluential to positions of the electrically conductive blocks. Besides, a step of planarizing the electrically conductive blocks can be further carried out. Therefore, the positions and flatness of probe needles may not need to be adjusted after the probe needles are connected with the electrically conductive blocks of the space transformer thus obtained.