Spacer Protrusion Self-Correction for Transfer Alignment
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Solution Overview
Problem
In semiconductor processing, spacers used in vertical processing apparatuses often rotate or deviate during transfer, leading to potential stoppages as they cannot be transferred sequentially, requiring manual removal and re-alignment, which disrupts the processing workflow.
Innovation Solution
A spacer with protrusions on its outer periphery that engage with a transfer mechanism, allowing it to rotate and move back into position, ensuring accurate placement and enabling sequential transfer without the need for external removal or re-alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Extent of automation
If the spacer is transferred sequentially using a transfer mechanism, then the transfer process can be automated and continuous, but the spacer rotates or deviates from the transfer position due to thermal expansion and shifts, making accurate positioning difficult
Solution Approach 1:
The spacer has protrusions that automatically engage with grooves in the holder to self-correct its position. When the spacer deviates or rotates during transfer, the protrusions slide along the grooves and guide the spacer back into the correct alignment without external intervention, enabling continuous automated operation while maintaining positioning accuracy
Solution Approach 2:
The groove structure in the holder is designed beforehand to accommodate and compensate for thermal expansion and positional shifts of the spacer. The grooves provide a tolerance zone that absorbs dimensional changes and guides the spacer into the correct position, preventing positioning errors before they affect the transfer accuracy
2Reliability
If the spacer deviates from the predetermined transfer position, then the sequential transfer process is interrupted, but the apparatus must stop to manually remove and reset the spacer, reducing productivity
Solution Approach 1:
The protrusion-groove mechanism enables the spacer to self-correct its position automatically during transfer. When deviation occurs, the protrusions slide along the grooves and guide the spacer back into alignment, allowing the transfer process to continue without interruption and maintaining high productivity
Solution Approach 2:
The groove structure provides continuous positional feedback to the spacer during transfer. As the spacer moves, the interaction between protrusions and grooves detects and corrects positional deviations in real-time, ensuring the spacer remains on the predetermined transfer path without requiring external monitoring or intervention
Data Source
AI summary
According to an embodiment of present disclosure, a spacer is provided. The spacer includes at least a protrusion formed to protrude from an outer periphery of the spacer. The protrusion serves to locate the spacer in place in a transfer mechanism configured to transfer the spacer when the spacer is fixed by the transfer mechanism in such a way that the protrusion comes in contact with the transfer mechanism, and configured to allow the spacer to rotate or move in case the spacer is deviated from a predetermined transfer position when the spacer is engaged with the transfer mechanism.