Spatial Light Modulation Element Module Segmentation
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Solution Overview
Problem
The yield rate of manufacturing spatial light modulation element modules significantly drops when the size of the spatial light modulation element is increased, leading to inefficiencies in utilizing silicon wafers and reducing the resolution of the module.
Innovation Solution
A spatial light modulation element module comprising a base member and multiple spatial light modulation element arrays, where each array modulates light intensity and phase, is maintained in a bare chip state with predetermined relative positions, and a photolithographing apparatus and exposure apparatus are developed to utilize these modules effectively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the size of the spatial light modulation element is increased, then the resolution of the module is improved, but the yield rate of manufacturing significantly drops
Solution Approach 1:
The spatial light modulation element is divided into multiple arrays, where each array functions as an independent module. This segmentation allows the overall system to achieve high resolution through combination of multiple smaller, manufacturable units rather than relying on a single large element that would have low yield rate.
2Measurement precision
If the size of the spatial light modulation element is increased, then the resolution of the module is improved, but the efficiency of utilizing silicon wafers is reduced
Solution Approach 1:
Multiple spatial light modulation element arrays are arranged on a single silicon wafer, maximizing the utilization of the wafer area. Each array can be independently manufactured and then combined, allowing efficient use of silicon wafer resources while achieving high overall resolution through the composite structure.
Solution Approach 2:
The patent transitions from a single large two-dimensional element to a three-dimensional arrangement of multiple smaller arrays on a wafer, then combines them into a larger functional structure. This dimensional approach allows efficient wafer utilization during manufacturing while achieving high resolution in the final assembled module.
3Measurement precision
If multiple spatial light modulation element arrays are arranged on a base member, then the resolution and throughput are enhanced, but the complexity of maintaining precise relative positions increases
Solution Approach 1:
The relative positions of multiple spatial light modulation element arrays are predetermined during the manufacturing process on the silicon wafer. This preliminary positioning ensures precise alignment is achieved during fabrication, reducing the complexity of maintaining accurate relative positions in subsequent assembly and operation stages.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the resolution and throughput of the spatial light modulation element module while maintaining a high yield rate, allowing for efficient utilization of silicon wafers and improved manufacturing efficiency.
Implementation Method 1
each of the plurality of spatial light modulation element arrays has a light modulation element which modulates at least one of the intensity and phase of an incident light and emits
Data Source
AI summary
A spatial light modulation element module having a large area is manufactured. A spatial light modulation element module comprising a base member and a plurality of spatial light modulation element arrays, wherein each of the plurality of spatial light modulation element arrays has a light modulation element which modulates and emits at least one of the intensity and the phase of an incident light, and the base member maintains the plurality of spatial light modulation element arrays in a predetermined relative position in a bare chip state. In the above-described spatial light modulation element module, the plurality of spatial light modulation element arrays may be in a staggered arrangement in at least 1 direction.