Spatial Light Modulator Conductive Layer for Electrical Connectivity
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Solution Overview
Problem
Spatial light modulators face challenges in forming a favorable electrical connection between their mirrors and substrates due to their three-dimensional structure, leading to issues with electrical connectivity during manufacturing.
Innovation Solution
The spatial light modulator design includes a substrate with a fixed electrode, a connecting section that deforms elastically to swing a movable section, a supporting post connected to the movable section, a reflecting member with a semiconductor layer and metal layer for ohmic contact, and a conductive layer on the supporting post to ensure electrical connection between the movable and fixed electrodes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a three-dimensional structure is used to support mirrors detached above a substrate, then the light modulation capability is improved, but the electrical connection between the substrate and mirrors deteriorates
Solution Approach 1:
A conductive layer is introduced as an intermediary component between the movable section and the movable electrode. This conductive layer ensures reliable electrical connection while allowing the three-dimensional detached structure to maintain its light modulation capability. The conductive layer acts as a mediator that bridges the electrical connectivity gap created by the elevated mirror structure.
Solution Approach 2:
The patent transitions from a planar two-dimensional electrode arrangement to a three-dimensional structure where mirrors are detached and positioned above the substrate. This dimensional change enables improved light modulation by allowing the reflecting surfaces to be optimally positioned in the vertical dimension, while the conductive layer and supporting structures maintain electrical connectivity across this new three-dimensional configuration.
2Reliability
If the film thickness of the conductive layer on the supporting post section is increased, then the electrical connection is improved, but the device complexity increases
Solution Approach 1:
Instead of uniformly increasing conductive layer thickness across the entire device, the patent applies the thicker conductive layer specifically to the supporting post section where electrical connection is most critical. This localized approach improves electrical connectivity at the bottleneck point without unnecessarily increasing complexity or material usage throughout the entire device structure.
3Manufacturing precision
If lithography technique is used to manufacture spatial light modulators, then the manufacturing precision is improved, but the formation of favorable electrical connection deteriorates
Solution Approach 1:
The patent segments the electrical connection path into distinct functional components: the fixed electrode on the substrate, the conductive layer on the supporting post, and the movable electrode on the reflecting member. This segmentation allows each component to be optimized independently - the lithography technique ensures precise positioning of the fixed electrode and supporting post, while the conductive layer is specifically designed to ensure reliable electrical connection to the movable electrode.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances the electrical connectivity and controllability of the reflecting sections, allowing for stable operation and efficient light modulation, preventing electromagnetic interference, and reducing the risk of pull-in phenomena, thereby improving the aperture ratio and productivity of the spatial light modulator.
Implementation Method 1
a movable section, which is connected to another end of the connecting section, and which swings with respect to the substrate due to elastic deformation of the connecting section
Implementation Method 2
an ohmic contact section which creates an ohmic contact between the semiconductor layer and the metal layer
Implementation Method 3
There are spatial light modulators manufactured with a lithography technique, and using electrostatic force to drive mirrors supported by torsion hinges
Data Source
AI summary
The spatial light modulator is provided with: a substrate; a fixed electrode disposed on a surface of the substrate; a connecting section, which has one end of the connecting section connected to the surface of the substrate; a movable section, which is connected to another end of the connecting section; a supporting post section, which extends in the thickness direction of the substrate with one end of the supporting post section connected to the movable section; a reflecting member, which is connected to another end of the supporting post section; a movable electrode, which is disposed on a surface of the reflecting member, the surface of the reflecting member facing the fixed electrode; and a conductive layer, which is disposed on the supporting post section with a film thickness larger than that of the movable electrode, and which electrically connects between the movable section and the movable electrode.