Spatial Light Modulator Structure for LiDAR Thermal Crosstalk

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Solution Overview

Problem

Existing LiDAR technologies face challenges in achieving high directivity and reliability due to thermal crosstalk between grating structures, which affects the efficiency of light steering and phase modulation.

Innovation Solution

A spatial light modulator design incorporating a filling layer with a low heat transfer coefficient, such as a vacuum or air, to isolate grating structures and reduce thermal crosstalk, combined with a dielectric layer for improved heat management and a reflective layer structure for enhanced phase control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If grating structures are placed close together to increase light steering efficiency, then productivity is improved, but thermal crosstalk increases causing reliability to deteriorate

Engineering Contradiction:
Improvelight steering efficiencyVSAvoidphase modulation accuracy
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent introduces a filling layer as an intermediary substance between adjacent grating structures. This filling layer, having different thermal and optical properties than the grating structures themselves, acts as a mediator that reduces thermal crosstalk while allowing the grating structures to remain in close proximity for efficient light steering. The filling layer transmits light effectively but impedes heat transfer between neighboring structures.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Temperature

If a material with high heat transfer coefficient is used to fill the space between grating structures, then thermal management is improved, but light transmission is blocked causing productivity to deteriorate

Engineering Contradiction:
Improveheat dissipationVSAvoidlight steering efficiency
Core Design Contradiction:
TemperatureVSProductivity

Solution Approach 1:

The patent applies the principle of local quality by selecting a filling layer material with specific local properties that differ from both the grating structures and the desired thermal management characteristics. The filling layer is engineered to have optical transparency matching the operating wavelength while possessing thermal properties that reduce heat transfer. This localized material selection allows different regions of the device to serve different functions: grating structures for light modulation, filling layer for thermal isolation and light transmission.

Inventive Principle:
Principle #3Local quality

3Reliability

If thermal crosstalk is reduced by increasing spacing between grating structures, then reliability is improved, but device area increases causing productivity to deteriorate

Engineering Contradiction:
Improvephase modulation accuracyVSAvoiddevice footprint
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The filling layer serves as a space-efficient intermediary that enables thermal isolation without requiring increased physical spacing. By placing this specialized layer directly between adjacent grating structures, the patent achieves thermal crosstalk reduction while maintaining compact device dimensions. The filling layer's thin profile allows it to fit within the existing device footprint while providing effective thermal barrier functionality.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design achieves improved side mode suppression ratio (SMSR) and increased directivity of light, reducing thermal crosstalk and enhancing the efficiency of light steering and phase modulation.

Implementation Method 1

a filling layer having a heat transfer coefficient of about 100 mW/m K or less, and being in contact with an upper surface of the resonance layer and surrounding at least one grating structure

Methodology Applied
Scientific EffectThermal insulation: Thermal Insulation

Implementation Method 2

a spatial light modulator configured to control an output phase of light

Methodology Applied
Scientific EffectPhase modulation: Phase Modulation

Implementation Method 3

a second reflective layer comprising a plurality of grating structures spaced apart from each other

Methodology Applied
Scientific EffectDiffraction: Diffraction

Data Source

PatentUS12541007B2Spatial light modulator and LiDAR apparatus including the same
Publication Date: 2026.02.03 SAMSUNG ELECTRONICS CO LTD
  • US12541007B2 patent drawing
  • US12541007B2 patent drawing
  • US12541007B2 patent drawing

AI summary

A spatial light modulator and a light detection and ranging (LiDAR) apparatus including the spatial light modulator are provided. The spatial light modulator includes: a first reflective layer; a second reflective layer comprising a plurality of grating structures spaced apart from each other; a resonance layer provided between the first reflective layer and the second reflective layer; and a filling layer having a heat transfer coefficient of about 100 mW/mK or less and being in contact with an upper surface of the resonance layer while surrounding at least one grating structure of the plurality of grating structures.